Vacuum-assisted microfluidic technique for fabrication of guided wave devices

Angel Flores, Sangyup Song, Sarfaraz Baig, Michael R. Wang

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


We report on a novel vacuum-assisted microfluidic (VAM) technique for guided wave device fabrication. Ultraviolet curable resins were used to demonstrate the effective VAM waveguide fabrication. Comparisons to a conventional soft molding technique demonstrate that the VAM approach results in lower propagation losses, lower crosstalk, and improved waveguide structures. More importantly, microscope analysis portrays improved device formation, sidewall edges, and the elimination of the polymer background residue inherent to traditional soft molding fabrication techniques. As a low-cost rapid prototyping technique, the VAM soft lithographic method allows guided wave devices to be implemented rapidly and inexpensively.

Original languageEnglish (US)
Pages (from-to)1246-1248
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number14
StatePublished - Jul 15 2008


  • Integrated optics
  • Microfluidics
  • Soft-lithography
  • Waveguides

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials


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