Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis

Hsiao Kang Chang, Xiaoli Wang, Noppadol Aroonyadet, Rui Zhang, Yan Song, Ram Datar, Richard J Cote, Mark Thompson, Chongwu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanobiosensors have drawn significant research interest in recent years owing to the advantages of label-free, electrical detection. However, nanobiosensors fabricated by bottom-up process are limited in terms of yield and device uniformity due to the challenges in assembly. Nanobiosensors fabricated by top-down process, on the other hand, exhibit better uniformity but require time and costly processes and materials to achieve the critical dimensions required for high sensitivity. In this report, we introduce a top-down nanobiosensor based on polysilicon nanoribbon. The polysilicon nanoribbon devices can be fabricated by conventional photolithography with only materials and equipments used in the standard CMOS process, thus resulting in great time and cost efficiency, as well as scalability. The devices show great response to pH changes with a wide dynamic range and high sensitivity. Biomarker detection is also demonstrated with clinically relevant sensitivity. Such results suggest that polysilicon nanoribbon devices exhibit great potential toward a highly efficient, reliable and sensitive biosensing platform.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
PublisherMaterials Research Society
Volume1569
DOIs
StatePublished - 2013
Event2013 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 1 2013Apr 5 2013

Other

Other2013 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/1/134/5/13

Fingerprint

Nanoribbons
Carbon Nanotubes
bioinstrumentation
Polysilicon
Biosensors
cancer
chips
sensitivity
Biomarkers
Photolithography
Scalability
Labels
biomarkers
photolithography
dynamic range
CMOS
platforms
assembly
costs
Costs

Keywords

  • Biomedical
  • Nanostructure
  • Sensor

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Chang, H. K., Wang, X., Aroonyadet, N., Zhang, R., Song, Y., Datar, R., ... Zhou, C. (2013). Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis. In Materials Research Society Symposium Proceedings (Vol. 1569). Materials Research Society. https://doi.org/10.1557/opl.2013.681

Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis. / Chang, Hsiao Kang; Wang, Xiaoli; Aroonyadet, Noppadol; Zhang, Rui; Song, Yan; Datar, Ram; Cote, Richard J; Thompson, Mark; Zhou, Chongwu.

Materials Research Society Symposium Proceedings. Vol. 1569 Materials Research Society, 2013.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chang, HK, Wang, X, Aroonyadet, N, Zhang, R, Song, Y, Datar, R, Cote, RJ, Thompson, M & Zhou, C 2013, Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis. in Materials Research Society Symposium Proceedings. vol. 1569, Materials Research Society, 2013 MRS Spring Meeting, San Francisco, CA, United States, 4/1/13. https://doi.org/10.1557/opl.2013.681
Chang HK, Wang X, Aroonyadet N, Zhang R, Song Y, Datar R et al. Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis. In Materials Research Society Symposium Proceedings. Vol. 1569. Materials Research Society. 2013 https://doi.org/10.1557/opl.2013.681
Chang, Hsiao Kang ; Wang, Xiaoli ; Aroonyadet, Noppadol ; Zhang, Rui ; Song, Yan ; Datar, Ram ; Cote, Richard J ; Thompson, Mark ; Zhou, Chongwu. / Top-down fabricated polysilicon nanoribbon biosensor chips for cancer diagnosis. Materials Research Society Symposium Proceedings. Vol. 1569 Materials Research Society, 2013.
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