Abstract
This paper illustrates the extension of Rayleigh wave based surface acoustic wave (SAW) viscosity and density sensor previously developed by the authors to integration with microfluidics and printed circuit board (PCB) based electronics. The SAW device is first modeled with a microchannel and analyzed using finite element method (FEM). Precise fabrication, alignment and bonding of polydimethylsiloxane (PDMS) microchannels on diced Y-Z lithium niobate substrates are accomplished. A high frequency PCB is built to obtain better performance for SAW device testing. Low glycerin concentrations in deionized (DI) water are analyzed. FEM simulation results and vector network analyzer (VNA) measurements of the devices with the microchannel and PCB integration are presented. For low frequency SAW sensor, a sensitivity of 171.9 Hz/(% glycerin) or 5.57 kHz/(kg/m 2√ s) in frequency shifts, 0.09 ° /(% glycerin) or 2.92 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 13.9 dB are achieved at peak frequency of 29.7 MHz. On the other hand, high frequency (86.1 MHz) SAW sensor provides a sensitivity of 937.5 Hz/(% glycerin) or 37.15 kHz/(kg/m 2√ s) in absolute frequency shifts, 0.37 ° /(% glycerin) or 14.7 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 20.5 dB.
| Original language | English (US) |
|---|---|
| Journal | IEEE Sensors Journal |
| DOIs | |
| State | Accepted/In press - Jan 23 2018 |
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Keywords
- finite element method
- liquid sensing
- Liquids
- Microchannels
- microfluidics
- PCB
- Sensor phenomena and characterization
- Substrates
- Surface acoustic waves
- Surface acoustic waves (SAWs)
- Viscosity
- viscosity sensor
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering
Cite this
Surface Acoustic Wave Viscosity Sensor with Integrated Microfluidics on a PCB Platform. / Yildirim, Burak; Senveli, Sukru U.; Gajasinghe, Rajapaksha W.R.L.; Tigli, Onur.
In: IEEE Sensors Journal, 23.01.2018.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Surface Acoustic Wave Viscosity Sensor with Integrated Microfluidics on a PCB Platform
AU - Yildirim, Burak
AU - Senveli, Sukru U.
AU - Gajasinghe, Rajapaksha W.R.L.
AU - Tigli, Onur
PY - 2018/1/23
Y1 - 2018/1/23
N2 - This paper illustrates the extension of Rayleigh wave based surface acoustic wave (SAW) viscosity and density sensor previously developed by the authors to integration with microfluidics and printed circuit board (PCB) based electronics. The SAW device is first modeled with a microchannel and analyzed using finite element method (FEM). Precise fabrication, alignment and bonding of polydimethylsiloxane (PDMS) microchannels on diced Y-Z lithium niobate substrates are accomplished. A high frequency PCB is built to obtain better performance for SAW device testing. Low glycerin concentrations in deionized (DI) water are analyzed. FEM simulation results and vector network analyzer (VNA) measurements of the devices with the microchannel and PCB integration are presented. For low frequency SAW sensor, a sensitivity of 171.9 Hz/(% glycerin) or 5.57 kHz/(kg/m 2√ s) in frequency shifts, 0.09 ° /(% glycerin) or 2.92 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 13.9 dB are achieved at peak frequency of 29.7 MHz. On the other hand, high frequency (86.1 MHz) SAW sensor provides a sensitivity of 937.5 Hz/(% glycerin) or 37.15 kHz/(kg/m 2√ s) in absolute frequency shifts, 0.37 ° /(% glycerin) or 14.7 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 20.5 dB.
AB - This paper illustrates the extension of Rayleigh wave based surface acoustic wave (SAW) viscosity and density sensor previously developed by the authors to integration with microfluidics and printed circuit board (PCB) based electronics. The SAW device is first modeled with a microchannel and analyzed using finite element method (FEM). Precise fabrication, alignment and bonding of polydimethylsiloxane (PDMS) microchannels on diced Y-Z lithium niobate substrates are accomplished. A high frequency PCB is built to obtain better performance for SAW device testing. Low glycerin concentrations in deionized (DI) water are analyzed. FEM simulation results and vector network analyzer (VNA) measurements of the devices with the microchannel and PCB integration are presented. For low frequency SAW sensor, a sensitivity of 171.9 Hz/(% glycerin) or 5.57 kHz/(kg/m 2√ s) in frequency shifts, 0.09 ° /(% glycerin) or 2.92 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 13.9 dB are achieved at peak frequency of 29.7 MHz. On the other hand, high frequency (86.1 MHz) SAW sensor provides a sensitivity of 937.5 Hz/(% glycerin) or 37.15 kHz/(kg/m 2√ s) in absolute frequency shifts, 0.37 ° /(% glycerin) or 14.7 ° /(kg/m 2√ s) in phase difference, and minimum signal-to-noise ratio of 20.5 dB.
KW - finite element method
KW - liquid sensing
KW - Liquids
KW - Microchannels
KW - microfluidics
KW - PCB
KW - Sensor phenomena and characterization
KW - Substrates
KW - Surface acoustic waves
KW - Surface acoustic waves (SAWs)
KW - Viscosity
KW - viscosity sensor
UR - http://www.scopus.com/inward/record.url?scp=85040983270&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85040983270&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2018.2797546
DO - 10.1109/JSEN.2018.2797546
M3 - Article
AN - SCOPUS:85040983270
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
SN - 1530-437X
ER -