TY - JOUR
T1 - Surface Acoustic Wave Viscosity Sensor with Integrated Microfluidics on a PCB Platform
AU - Yildirim, Burak
AU - Senveli, Sukru U.
AU - Gajasinghe, Rajapaksha W.R.L.
AU - Tigli, Onur
N1 - Funding Information:
Manuscript received May 17, 2017; revised August 30, 2017 and October 24, 2017; accepted January 8, 2018. Date of publication January 24, 2018; date of current version February 21, 2018. This work was supported by the National Science Foundation under Grant ECCS-1349245. This paper was presented at the IEEE Sensors Conference, Orlando, FL, USA, in 2016. The associate editor coordinating the review of this paper and approving it for publication was Prof. Yu-Te Liao. (Corresponding author: Burak Yildirim.) B. Yildirim, S. U. Senveli, and R. W. R. L. Gajasinghe are with the Department of Electrical and Computer Engineering, University of Miami, Coral Gables, FL 33146 USA, and also with the Dr. John T. Macdonald Foundation Biomedical Nanotechnology Institute, University of Miami, Miami, FL 33136 USA (e-mail: b.yildirim@miami.edu; senveli@umiami.edu; r.gajasinghe@umiami.edu).
Publisher Copyright:
© 2001-2012 IEEE.
PY - 2018/3/15
Y1 - 2018/3/15
N2 - This paper illustrates the extension of Rayleigh wave-based surface acoustic wave (SAW) viscosity and density sensor previously developed by the authors for integration with microfluidics and printed circuit board (PCB)-based electronics. The SAW device is first modeled with a microchannel and analyzed using finite-element method (FEM) software. Precise fabrication, alignment, and bonding of polydimethylsiloxane microchannels on diced Y-Z lithium niobate substrates are accomplished. A high-frequency PCB is built to obtain a better performance for SAW device testing. Low glycerin concentrations in deionized (DI) water are analyzed. The FEM simulation results and vector network analyzer measurements of the devices with the microchannel and PCB integration are presented. For low-frequency SAW sensor, a sensitivity of 171.9 Hz/(% glycerin) or 5.57 kHz/(kg/2√s) in frequency shifts, 0.09°/(% glycerin) or 2.92°/(kg/2√s ) in phase difference, and minimum signal-To-noise ratio of 13.9 dB are achieved at peak frequency of 29.7 MHz. On the other hand, high-frequency (86.1 MHz) SAW sensor provides a sensitivity of 937.5 Hz/(% glycerin) or 37.15 kHz/(kg/2√s) in absolute frequency shifts, 0.37°/(% glycerin) or 14.7°/(kg/2√s) in phase difference, and minimum signal-To-noise ratio of 20.5 dB.
AB - This paper illustrates the extension of Rayleigh wave-based surface acoustic wave (SAW) viscosity and density sensor previously developed by the authors for integration with microfluidics and printed circuit board (PCB)-based electronics. The SAW device is first modeled with a microchannel and analyzed using finite-element method (FEM) software. Precise fabrication, alignment, and bonding of polydimethylsiloxane microchannels on diced Y-Z lithium niobate substrates are accomplished. A high-frequency PCB is built to obtain a better performance for SAW device testing. Low glycerin concentrations in deionized (DI) water are analyzed. The FEM simulation results and vector network analyzer measurements of the devices with the microchannel and PCB integration are presented. For low-frequency SAW sensor, a sensitivity of 171.9 Hz/(% glycerin) or 5.57 kHz/(kg/2√s) in frequency shifts, 0.09°/(% glycerin) or 2.92°/(kg/2√s ) in phase difference, and minimum signal-To-noise ratio of 13.9 dB are achieved at peak frequency of 29.7 MHz. On the other hand, high-frequency (86.1 MHz) SAW sensor provides a sensitivity of 937.5 Hz/(% glycerin) or 37.15 kHz/(kg/2√s) in absolute frequency shifts, 0.37°/(% glycerin) or 14.7°/(kg/2√s) in phase difference, and minimum signal-To-noise ratio of 20.5 dB.
KW - PCB
KW - Surface acoustic waves (SAWs)
KW - finite element method
KW - liquid sensing
KW - microfluidics
KW - viscosity sensor
UR - http://www.scopus.com/inward/record.url?scp=85040983270&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85040983270&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2018.2797546
DO - 10.1109/JSEN.2018.2797546
M3 - Article
AN - SCOPUS:85040983270
VL - 18
SP - 2305
EP - 2312
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
SN - 1530-437X
IS - 6
ER -