Surface acoustic wave (SAW) biosensors

Onur Tigli, Mona E. Zaghloul

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations


This paper reports an overview of biosensor technologies employing surface acoustic wave (SAW) principles for detection of biomarkers. First, the field of biosensors will be introduced in a broader framework through a general survey of the most popular transduction mechanisms in current biosensor research. Secondly, SAW based piezoelectric transduction mechanism along with device design approaches will be discussed. In this discussion, modeling, fabrication, optimization and characterization of SAW biosensors designed in CMOS technology will be laid out. An assortment of design novelties [1]-[3] such as circular architecture, embedded heaters, acoustic absorbers and their corresponding performance improvements will be introduced. In conclusion, we will list major research areas to be explored in developing sensitive biosensors by reflecting on problems encountered in improving sensitivity, selectivity, and specificity of such sensors throughout our CMOS-SAW biosensor research.

Original languageEnglish (US)
Title of host publication2010 IEEE International 53rd Midwest Symposium on Circuits and Systems, MWSCAS 2010
Number of pages4
StatePublished - Sep 20 2010
Externally publishedYes
Event53rd IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2010 - Seattle, WA, United States
Duration: Aug 1 2010Aug 4 2010

Publication series

NameMidwest Symposium on Circuits and Systems
ISSN (Print)1548-3746


Other53rd IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2010
Country/TerritoryUnited States
CitySeattle, WA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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