TY - GEN
T1 - Surface acoustic wave based biosensor in cmos for cancer biomarker detection
AU - Tigli, Onur
AU - Bivona, Louis
AU - Chaterjee, Cynthia
AU - Zaghloul, Mona E.
AU - Berg, Patricia
PY - 2008
Y1 - 2008
N2 - This paper reports a novel SAW based biosensor developed in CMOS technology for detecting cancer biomarkers in a dip and dry test fashion. The results obtained in our previous work demonstrate that it is possible to design and fabricate SAW delay lines in CMOS with comparable performance to conventional devices. CMOS-SAW devices employ design novelties such as embedded heaters for temperature stability analysis, acoustic absorbers, and EM feedthrough contacts. Due to its highly useful material properties gold was employed as the interface material between the SAW transducers and the selective sensing material of interest, namely streptavidin-biotinylated mammoglobin (hMAM) antibody. A five layered sensing assay was characterized and optimized. The sensitivities of the devices were analyzed primarily based on center frequency shifts. A frequency sensitivity of 8.704 pg/Hz and a mass sensitivity of 2810.25 m2/kg were obtained. Experimental results indicate that it is possible to attach cancer biomarkers to functionalized CMOS-SAW sensor surfaces and selectively detect hMAM antigens with improved sensitivities, lowered costs, and increased reusability.
AB - This paper reports a novel SAW based biosensor developed in CMOS technology for detecting cancer biomarkers in a dip and dry test fashion. The results obtained in our previous work demonstrate that it is possible to design and fabricate SAW delay lines in CMOS with comparable performance to conventional devices. CMOS-SAW devices employ design novelties such as embedded heaters for temperature stability analysis, acoustic absorbers, and EM feedthrough contacts. Due to its highly useful material properties gold was employed as the interface material between the SAW transducers and the selective sensing material of interest, namely streptavidin-biotinylated mammoglobin (hMAM) antibody. A five layered sensing assay was characterized and optimized. The sensitivities of the devices were analyzed primarily based on center frequency shifts. A frequency sensitivity of 8.704 pg/Hz and a mass sensitivity of 2810.25 m2/kg were obtained. Experimental results indicate that it is possible to attach cancer biomarkers to functionalized CMOS-SAW sensor surfaces and selectively detect hMAM antigens with improved sensitivities, lowered costs, and increased reusability.
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U2 - 10.1109/ICSENS.2008.4716718
DO - 10.1109/ICSENS.2008.4716718
M3 - Conference contribution
AN - SCOPUS:67649921550
SN - 9781424425808
T3 - Proceedings of IEEE Sensors
SP - 1452
EP - 1455
BT - 2008 IEEE Sensors, SENSORS 2008
T2 - 2008 IEEE Sensors, SENSORS 2008
Y2 - 26 October 2008 through 29 October 2008
ER -