Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects

Guomin Jiang, Sarfaraz Baig, Michael R. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Polymer waveguides with 45° mirrors are fabricated by vacuum assisted microfluidic (VAM) soft lithographic technique for card-to-backplane optical interconnect applications. Waveguide array structures with inclined surfaces in SU-8 photoresist for PDMS mold are fabricated by prism assisted UV exposure. Sample surface reflected UV light is utilized to eliminate undercut structures and to accomplish the inclined mirror surfaces on both ends of the straight waveguide segments by one-step UV exposure. Polymer waveguides with 45° embedded mirrors demonstrated about 0.49 dB/cm propagation loss and 67% mirror coupling efficiency.

Original languageEnglish (US)
Title of host publicationOptoelectronic Interconnects XII
DOIs
StatePublished - Mar 26 2012
EventOptoelectronic Interconnects XII - San Francisco, CA, United States
Duration: Jan 23 2012Jan 25 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8267
ISSN (Print)0277-786X

Other

OtherOptoelectronic Interconnects XII
CountryUnited States
CitySan Francisco, CA
Period1/23/121/25/12

Keywords

  • Microfluidic
  • Optical Interconnection
  • Polymer Waveguide
  • Soft Lithography

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • Cite this

    Jiang, G., Baig, S., & Wang, M. R. (2012). Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. In Optoelectronic Interconnects XII [82670R] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8267). https://doi.org/10.1117/12.908243