Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects

Guomin Jiang, Sarfaraz Baig, Michael Renxun Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Polymer waveguides with 45° mirrors are fabricated by vacuum assisted microfluidic (VAM) soft lithographic technique for card-to-backplane optical interconnect applications. Waveguide array structures with inclined surfaces in SU-8 photoresist for PDMS mold are fabricated by prism assisted UV exposure. Sample surface reflected UV light is utilized to eliminate undercut structures and to accomplish the inclined mirror surfaces on both ends of the straight waveguide segments by one-step UV exposure. Polymer waveguides with 45° embedded mirrors demonstrated about 0.49 dB/cm propagation loss and 67% mirror coupling efficiency.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8267
DOIs
StatePublished - Mar 26 2012
EventOptoelectronic Interconnects XII - San Francisco, CA, United States
Duration: Jan 23 2012Jan 25 2012

Other

OtherOptoelectronic Interconnects XII
CountryUnited States
CitySan Francisco, CA
Period1/23/121/25/12

Fingerprint

Polymer Waveguide
Optical Interconnects
optical interconnects
Optical interconnects
cards
Inclined
Lithography
Mirror
Polymers
Waveguides
lithography
mirrors
waveguides
polymers
Waveguide
Mirrors
Photoresist
Prism
Microfluidics
Photoresists

Keywords

  • Microfluidic
  • Optical Interconnection
  • Polymer Waveguide
  • Soft Lithography

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Jiang, G., Baig, S., & Wang, M. R. (2012). Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8267). [82670R] https://doi.org/10.1117/12.908243

Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. / Jiang, Guomin; Baig, Sarfaraz; Wang, Michael Renxun.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8267 2012. 82670R.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Jiang, G, Baig, S & Wang, MR 2012, Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8267, 82670R, Optoelectronic Interconnects XII, San Francisco, CA, United States, 1/23/12. https://doi.org/10.1117/12.908243
Jiang G, Baig S, Wang MR. Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8267. 2012. 82670R https://doi.org/10.1117/12.908243
Jiang, Guomin ; Baig, Sarfaraz ; Wang, Michael Renxun. / Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8267 2012.
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