@inproceedings{f80e576e6b21463b86a3f1d8775b3a71,
title = "Soft lithography fabricated polymer waveguides with 45° inclined mirrors for Card-to-backplane optical interconnects",
abstract = "Polymer waveguides with 45° mirrors are fabricated by vacuum assisted microfluidic (VAM) soft lithographic technique for card-to-backplane optical interconnect applications. Waveguide array structures with inclined surfaces in SU-8 photoresist for PDMS mold are fabricated by prism assisted UV exposure. Sample surface reflected UV light is utilized to eliminate undercut structures and to accomplish the inclined mirror surfaces on both ends of the straight waveguide segments by one-step UV exposure. Polymer waveguides with 45° embedded mirrors demonstrated about 0.49 dB/cm propagation loss and 67% mirror coupling efficiency.",
keywords = "Microfluidic, Optical Interconnection, Polymer Waveguide, Soft Lithography",
author = "Guomin Jiang and Sarfaraz Baig and Wang, {Michael R.}",
year = "2012",
month = mar,
day = "26",
doi = "10.1117/12.908243",
language = "English (US)",
isbn = "9780819489104",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optoelectronic Interconnects XII",
note = "Optoelectronic Interconnects XII ; Conference date: 23-01-2012 Through 25-01-2012",
}