Prism-assisted inclined UV lithography for 3D microstructure fabrication

Guomin Jiang, Sarfaraz Baig, Michael Renxun Wang

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13 Scopus citations

Abstract

A prism-assisted inclined ultraviolet (UV) lithography technique is introduced for the fabrication of three-dimensional (3D) microstructures. Slanted structures with exposure angles ranging from 0°to 60°in SU-8 photoresist have been easily achieved without immersion in the index matching liquid. The fabrication process of multidirectional slanted structures can be simplified by one-step UV exposure using a prism with multidirectional side surfaces. A corner prism and a cone prism have been used in our experiment to demonstrate this concept. Upside-down tripod structures and horn structures have been fabricated in one-step exposures. The effective exposure area as one key parameter of the one-step exposure is analyzed for practical applications. Examples of various 3D microstructures fabricated by this method are presented.

Original languageEnglish
Article number085022
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number8
DOIs
StatePublished - Aug 1 2012

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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