Polynomial inversion of the single transparent layer problem in ellipsometry

Jean Pierre Drolet, Stoyan C. Russev, Maxim I. Boyanov, Roger M. Leblanc

Research output: Contribution to journalArticle

24 Scopus citations

Abstract

Ellipsometric inversion problem for one nonabsorbing layer with unknown thickness and refractive index over an arbitrary substrate is discussed. The method solves an equation that depends only on the refractive index, and calculates the thickness from this refractive index. The equation for the refractive index is reduced to a fifth degree polynomial for relative dielectric constant.

Original languageEnglish (US)
Pages (from-to)3284-3291
Number of pages8
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume11
Issue number12
DOIs
StatePublished - Jan 1 1994

Keywords

  • Ellipsometry
  • Refractive index
  • Single-layer system
  • Solution
  • Thickness

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Vision and Pattern Recognition

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