Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-TrFE

Yagmur Akin Yildirim, Alperen Toprak, Onur Tigli

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


This paper presents the design, fabrication, and performance evaluation of a biocompatible piezoelectric membrane actuator (PMA) using polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Electrode structure optimization was verified by a finite element method simulation software. Fabrication was done utilizing only standard microfabrication techniques. 1- μ m-thick membrane and 1.5-μm-thick actuator layers were formed by spin coating using PVDF-TrFE. The surface roughness of the fabricated film was measured as 7.9 nm using a tabletop atomic force microscope (AFM) and remnant polarization at 200 V was measured as 5.38 μC/cm2. Deflection measurements were performed with an Al coated tipless AFM probe using a precision nano displacement system, which consists of a ferroelectric tester, a table top AFM, and a computer. A 432 nm displacement was obtained at 9 V under non-resonant conditions from a PMA with 2250 μm diameter. Since all moving structures were fabricated from a polymer material, high displacements could be obtained without fracture. The results demonstrated that the proposed PMA can be a good candidate for membrane type micropumps, especially to be used in biomedical applications, where low driving voltage and biocompatibility are required. [2017-0128]

Original languageEnglish (US)
Article number8125582
Pages (from-to)86-94
Number of pages9
JournalJournal of Microelectromechanical Systems
Issue number1
StatePublished - Feb 2018


  • Piezoelectric actuators
  • electroactive polymer actuators
  • membrane type micropump
  • piezoelectric membrane
  • piezoelectric micropump
  • polymer micropump
  • polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE)

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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