Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-TrFE

Yagmur Akin Yildirim, Alperen Toprak, Onur Tigli

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

This paper presents the design, fabrication, and performance evaluation of a biocompatible piezoelectric membrane actuator (PMA) using polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Electrode structure optimization was verified by a finite element method simulation software. Fabrication was done utilizing only standard microfabrication techniques. 1-μm-thick membrane and 1.5-μm-thick actuator layers were formed by spin coating using PVDF-TrFE. The surface roughness of the fabricated film was measured as 7.9 nm using a tabletop atomic force microscope (AFM) and remnant polarization at 200 V was measured as 5.38 μC/cm². Deflection measurements were performed with an Al coated tipless AFM probe using a precision nano displacement system, which consists of a ferroelectric tester, a table top AFM, and a computer. A 432 nm displacement was obtained at 9 V under non-resonant conditions from a PMA with 2250 μm diameter. Since all moving structures were fabricated from a polymer material, high displacements could be obtained without fracture. The results demonstrated that the proposed PMA can be a good candidate for membrane type micropumps, especially to be used in biomedical applications, where low driving voltage and biocompatibility are required. [2017-0128]

Original languageEnglish (US)
JournalJournal of Microelectromechanical Systems
DOIs
StateAccepted/In press - Nov 30 2017

Keywords

  • Actuators
  • Biomembranes
  • Coatings
  • electroactive polymer actuators
  • Electrodes
  • Fabrication
  • membrane type micropump
  • Micropumps
  • Piezoelectric actuators
  • piezoelectric membrane.
  • piezoelectric micropump
  • polymer micropump
  • polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE)
  • Silicon

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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