Optimization of L10-FePt/MgO/CrRu thin films for next-generation magnetic recording media

R. Fernandez, N. Amos, C. Zhang, B. Lee, S. Khizroev

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


L10-FePt thin films were deposited on silicon substrates with the structure of Si/CrRu/MgO/FePt. The magnetic and microstructural properties were optimized by varying the FePt sputter pressure and temperature, as well as the thicknesses of all three layers. High coercivity films greater than 1.8 T were grown when the FePt sputter pressure was at 1.33 Pa with a thickness of only 4 nm, on CrRu and MgO underlayers as thin as 10 nm and 2 nm, respectively.

Original languageEnglish (US)
Pages (from-to)8053-8057
Number of pages5
JournalThin Solid Films
Issue number22
StatePublished - Sep 1 2011
Externally publishedYes


  • FePt
  • Perpendicular magnetic recording
  • Sputter deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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