On the mechanism of the cubic phase formation in the boron nitride thin-film systems

S. Khizroev, D. Litvinov

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

A study of stress-induced mechanism of the cubic phase formation in boron nitride thin film systems was presented. The role of nitrogen ion irradiation in two distinct deposition modes of the cubic boron nitride phase was also discussed. The complaint nature of turbostratic boron nitride was found to be essential for cubic phase nucleation. The development of two distinct regimes of cubic boron nitride was observed. A cubic boron nitride seed layer was formed on the top of the turbostratic boron nitride buffer layer followed by the growth mode of cubic phase.

Original languageEnglish (US)
Pages (from-to)353-355
Number of pages3
JournalApplied Physics Letters
Volume79
Issue number3
DOIs
StatePublished - Jul 16 2001
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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