Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens.

Original languageEnglish
Pages (from-to)876-878
Number of pages3
JournalOptics Letters
Volume23
Issue number11
StatePublished - Jun 1 1998

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etching
fabrication
glass
lasers
energy
transmittance
masks
ions

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass. / Wang, Michael Renxun; Su, Heng.

In: Optics Letters, Vol. 23, No. 11, 01.06.1998, p. 876-878.

Research output: Contribution to journalArticle

@article{7948a3c3e47b4d3a89c210158f381197,
title = "Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass",
abstract = "A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens.",
author = "Wang, {Michael Renxun} and Heng Su",
year = "1998",
month = "6",
day = "1",
language = "English",
volume = "23",
pages = "876--878",
journal = "Optics Letters",
issn = "0146-9592",
publisher = "The Optical Society",
number = "11",

}

TY - JOUR

T1 - Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass

AU - Wang, Michael Renxun

AU - Su, Heng

PY - 1998/6/1

Y1 - 1998/6/1

N2 - A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens.

AB - A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens.

UR - http://www.scopus.com/inward/record.url?scp=0032095581&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032095581&partnerID=8YFLogxK

M3 - Article

C2 - 18087371

AN - SCOPUS:0032095581

VL - 23

SP - 876

EP - 878

JO - Optics Letters

JF - Optics Letters

SN - 0146-9592

IS - 11

ER -