Modeling and simulation of PVDF-TrFE based MEMS scale cantilever type energy harvesters

Alperen Toprak, Onur Tigli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this paper, we present the FEM modeling and simulation of a cantilever type piezoelectric energy harvester (PEH) constructed using PVDF-TrFE. Frequency domain analyses are performed under a 10 pN tip force on the 2D model of a 600 μm-long cantilever, which consists of a 7.25 μm PVDF-TrFE layer on top of a 2 μm SiO2 film. The same analyses are repeated using ZnO, AlN, and PZT-5A for comparison. Simulated maximum output powers and corresponding voltages are 60.3 nW at 0.73 V for PVDF-TrFE, 62.0 nW at 0.32 V for ZnO, 12.4 nW at 0.13 V for AlN, and 301.9 nW at 0.07 V for PZT-5A. The effects of a multi-layer approach on the device outputs are also simulated for PVDF-TrFE, which shows that the maximum output power is not affected by the number of layers. Our study demonstrates that PVDF-TrFE, a biocompatible piezoelectric polymer, can be easily used in a single or multi-layer architecture with no significant loss of power; making it an attractive material for energy harvesting.

Original languageEnglish (US)
Title of host publicationTechnical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
PublisherNano Science and Technology Institute
Pages69-72
Number of pages4
ISBN (Print)9781482258271
StatePublished - Jan 1 2014
EventNanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 - Washington, DC, United States
Duration: Jun 15 2014Jun 18 2014

Publication series

NameTechnical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
Volume2

Other

OtherNanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
CountryUnited States
CityWashington, DC
Period6/15/146/18/14

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Keywords

  • Energy harvesting
  • Piezoelectric
  • PVDF-TrFE

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Toprak, A., & Tigli, O. (2014). Modeling and simulation of PVDF-TrFE based MEMS scale cantilever type energy harvesters. In Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 (pp. 69-72). (Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014; Vol. 2). Nano Science and Technology Institute.