Magnetostrictively deforming the surface of a Silicon wafer at two locations

M. P. Ulmer; R. Coppejans; M. A. Khreishi; K. Keely; D. B. Buchholz; R. Shiri; L. A. Rodriguez; A. E. O'Donnell; Z. J. Shonfeld; W. H. Reinhardt; L. E. Borgsmiller; T. B. Baturalp; V. L. Coverstone; J. Cao

doi:10.1117/12.2322511

Magnetostrictively deforming the surface of a Silicon wafer at two locations

M. P. Ulmer, R. Coppejans, M. A. Khreishi, K. Keely, D. B. Buchholz, R. Shiri, L. A. Rodriguez, A. E. O'Donnell, Z. J. Shonfeld, W. H. Reinhardt, L. E. Borgsmiller, T. B. Baturalp, V. L. Coverstone, J. Cao

Mechanical & Aerospace Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

The only way to increase the sensitivity of X-ray telescopes without significantly increasing their size (compared to existing telescopes) is to use thinner mirror shells. However, to maintain the figure of thin mirror shells, their shape will need to be adjusted after they are mounted and/or actively controlled during flight. Here we describe progress toward developing a method that can be used to do both. The core of the concept is to coat thin (< 500 μm) X-ray mirrors with a 10 μm layer of magnetic smart material (MSM). When an external magnetic field is applied to the MSM layer it will expand or contract, changing the shape of the mirror. We have previously demonstrated that this method can be used to generate a single localized deformation on the surface of a test sample. Here we present work to study how two deformations affect each other. The first deformation that we created has a height of 5 μm. The second deformation, generated by applying a magnetic field to the sample 4mm from the first position, has a height of 1 μm. It is likely that the second deformation is smaller than the first because the two areas where the magnetic field was applied were close to each other. This could have caused the MSM to already be partially expanded in the second area when the field was applied there.

Original language	English (US)
Title of host publication	Adaptive X-Ray Optics V
Editors	Daniele Spiga, Hidekazu Mimura, Daniele Spiga
Publisher	SPIE
ISBN (Electronic)	9781510620933
DOIs	https://doi.org/10.1117/12.2322511
State	Published - 2018
Event	Adaptive X-Ray Optics V 2018 - San Diego, United States Duration: Aug 21 2018 → …

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10761
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Adaptive X-Ray Optics V 2018
Country	United States
City	San Diego
Period	8/21/18 → …

Keywords

Grazing incidence optics
Magnetic smart materials
Silicon
X-ray optics

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2322511

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Ulmer, M. P., Coppejans, R., Khreishi, M. A., Keely, K., Buchholz, D. B., Shiri, R., Rodriguez, L. A., O'Donnell, A. E., Shonfeld, Z. J., Reinhardt, W. H., Borgsmiller, L. E., Baturalp, T. B., Coverstone, V. L., & Cao, J. (2018). Magnetostrictively deforming the surface of a Silicon wafer at two locations. In D. Spiga, H. Mimura, & D. Spiga (Eds.), Adaptive X-Ray Optics V [107610B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10761). SPIE. https://doi.org/10.1117/12.2322511

Magnetostrictively deforming the surface of a Silicon wafer at two locations. / Ulmer, M. P.; Coppejans, R.; Khreishi, M. A.; Keely, K.; Buchholz, D. B.; Shiri, R.; Rodriguez, L. A.; O'Donnell, A. E.; Shonfeld, Z. J.; Reinhardt, W. H.; Borgsmiller, L. E.; Baturalp, T. B.; Coverstone, V. L.; Cao, J.

Adaptive X-Ray Optics V. ed. / Daniele Spiga; Hidekazu Mimura; Daniele Spiga. SPIE, 2018. 107610B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10761).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ulmer, MP, Coppejans, R, Khreishi, MA, Keely, K, Buchholz, DB, Shiri, R, Rodriguez, LA, O'Donnell, AE, Shonfeld, ZJ, Reinhardt, WH, Borgsmiller, LE, Baturalp, TB, Coverstone, VL & Cao, J 2018, Magnetostrictively deforming the surface of a Silicon wafer at two locations. in D Spiga, H Mimura & D Spiga (eds), Adaptive X-Ray Optics V., 107610B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10761, SPIE, Adaptive X-Ray Optics V 2018, San Diego, United States, 8/21/18. https://doi.org/10.1117/12.2322511

Ulmer, M. P. ; Coppejans, R. ; Khreishi, M. A. ; Keely, K. ; Buchholz, D. B. ; Shiri, R. ; Rodriguez, L. A. ; O'Donnell, A. E. ; Shonfeld, Z. J. ; Reinhardt, W. H. ; Borgsmiller, L. E. ; Baturalp, T. B. ; Coverstone, V. L. ; Cao, J. / Magnetostrictively deforming the surface of a Silicon wafer at two locations. Adaptive X-Ray Optics V. editor / Daniele Spiga ; Hidekazu Mimura ; Daniele Spiga. SPIE, 2018. (Proceedings of SPIE - The International Society for Optical Engineering).

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title = "Magnetostrictively deforming the surface of a Silicon wafer at two locations",

abstract = "The only way to increase the sensitivity of X-ray telescopes without significantly increasing their size (compared to existing telescopes) is to use thinner mirror shells. However, to maintain the figure of thin mirror shells, their shape will need to be adjusted after they are mounted and/or actively controlled during flight. Here we describe progress toward developing a method that can be used to do both. The core of the concept is to coat thin (< 500 μm) X-ray mirrors with a 10 μm layer of magnetic smart material (MSM). When an external magnetic field is applied to the MSM layer it will expand or contract, changing the shape of the mirror. We have previously demonstrated that this method can be used to generate a single localized deformation on the surface of a test sample. Here we present work to study how two deformations affect each other. The first deformation that we created has a height of 5 μm. The second deformation, generated by applying a magnetic field to the sample 4mm from the first position, has a height of 1 μm. It is likely that the second deformation is smaller than the first because the two areas where the magnetic field was applied were close to each other. This could have caused the MSM to already be partially expanded in the second area when the field was applied there.",

keywords = "Grazing incidence optics, Magnetic smart materials, Silicon, X-ray optics",

author = "Ulmer, {M. P.} and R. Coppejans and Khreishi, {M. A.} and K. Keely and Buchholz, {D. B.} and R. Shiri and Rodriguez, {L. A.} and O'Donnell, {A. E.} and Shonfeld, {Z. J.} and Reinhardt, {W. H.} and Borgsmiller, {L. E.} and Baturalp, {T. B.} and Coverstone, {V. L.} and J. Cao",

note = "Funding Information: This work was supported primarily by an adaptive X-ray optics NASA grant (Grant NNX16AL31G) plus support from a NASA NIAC grant (NX15AL89G). We also thank the ISEN center at Northwestern University for providing funds for purchasing additional sputtering guns. This work made use of the EPIC facility of Northwestern Universitys NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1121262) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN. We thank Yip-Wah Chung for advice on coating, materials, and magnetics. Special acknowledgement and thanks is extended to the Illinois Space Grant Consortium for providing support via the Northwestern Summer University Undergraduate Research Program to Z.J.S and W.H.R; Adaptive X-Ray Optics V 2018 ; Conference date: 21-08-2018",

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editor = "Daniele Spiga and Hidekazu Mimura and Daniele Spiga",

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AU - Ulmer, M. P.

AU - Coppejans, R.

AU - Khreishi, M. A.

AU - Keely, K.

AU - Buchholz, D. B.

AU - Shiri, R.

AU - Rodriguez, L. A.

AU - O'Donnell, A. E.

AU - Shonfeld, Z. J.

AU - Reinhardt, W. H.

AU - Borgsmiller, L. E.

AU - Baturalp, T. B.

AU - Coverstone, V. L.

AU - Cao, J.

N1 - Funding Information: This work was supported primarily by an adaptive X-ray optics NASA grant (Grant NNX16AL31G) plus support from a NASA NIAC grant (NX15AL89G). We also thank the ISEN center at Northwestern University for providing funds for purchasing additional sputtering guns. This work made use of the EPIC facility of Northwestern Universitys NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1121262) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN. We thank Yip-Wah Chung for advice on coating, materials, and magnetics. Special acknowledgement and thanks is extended to the Illinois Space Grant Consortium for providing support via the Northwestern Summer University Undergraduate Research Program to Z.J.S and W.H.R

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N2 - The only way to increase the sensitivity of X-ray telescopes without significantly increasing their size (compared to existing telescopes) is to use thinner mirror shells. However, to maintain the figure of thin mirror shells, their shape will need to be adjusted after they are mounted and/or actively controlled during flight. Here we describe progress toward developing a method that can be used to do both. The core of the concept is to coat thin (< 500 μm) X-ray mirrors with a 10 μm layer of magnetic smart material (MSM). When an external magnetic field is applied to the MSM layer it will expand or contract, changing the shape of the mirror. We have previously demonstrated that this method can be used to generate a single localized deformation on the surface of a test sample. Here we present work to study how two deformations affect each other. The first deformation that we created has a height of 5 μm. The second deformation, generated by applying a magnetic field to the sample 4mm from the first position, has a height of 1 μm. It is likely that the second deformation is smaller than the first because the two areas where the magnetic field was applied were close to each other. This could have caused the MSM to already be partially expanded in the second area when the field was applied there.

AB - The only way to increase the sensitivity of X-ray telescopes without significantly increasing their size (compared to existing telescopes) is to use thinner mirror shells. However, to maintain the figure of thin mirror shells, their shape will need to be adjusted after they are mounted and/or actively controlled during flight. Here we describe progress toward developing a method that can be used to do both. The core of the concept is to coat thin (< 500 μm) X-ray mirrors with a 10 μm layer of magnetic smart material (MSM). When an external magnetic field is applied to the MSM layer it will expand or contract, changing the shape of the mirror. We have previously demonstrated that this method can be used to generate a single localized deformation on the surface of a test sample. Here we present work to study how two deformations affect each other. The first deformation that we created has a height of 5 μm. The second deformation, generated by applying a magnetic field to the sample 4mm from the first position, has a height of 1 μm. It is likely that the second deformation is smaller than the first because the two areas where the magnetic field was applied were close to each other. This could have caused the MSM to already be partially expanded in the second area when the field was applied there.

KW - Grazing incidence optics

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