Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication

Research output: Contribution to journalArticle

64 Citations (Scopus)

Abstract

High-efficiency diffractive optical elements can be achieved by an increase in the number of phase levels. We present a technique for laser direct-write gray-level masks on high-energy-beam-sensitive glass and one-step etching on the gray-level mask plate for the production of high-efficiency diffractive optical elements. Sixteen-phase-level diffractive microlenses and microlens arrays with a focusing efficiency of approximately 94% have been realized by use of the one-step nonphotolithographic fabrication technique.

Original languageEnglish
Pages (from-to)7568-7576
Number of pages9
JournalApplied Optics
Volume37
Issue number32
StatePublished - Dec 1 1998

Fingerprint

Diffractive optical elements
Masks
Etching
masks
etching
Fabrication
fabrication
Lasers
Microlenses
lasers
Glass
glass
energy

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication. / Wang, Michael Renxun.

In: Applied Optics, Vol. 37, No. 32, 01.12.1998, p. 7568-7576.

Research output: Contribution to journalArticle

@article{fd6eccdf68bb44c1b923eb6153fffdbe,
title = "Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication",
abstract = "High-efficiency diffractive optical elements can be achieved by an increase in the number of phase levels. We present a technique for laser direct-write gray-level masks on high-energy-beam-sensitive glass and one-step etching on the gray-level mask plate for the production of high-efficiency diffractive optical elements. Sixteen-phase-level diffractive microlenses and microlens arrays with a focusing efficiency of approximately 94{\%} have been realized by use of the one-step nonphotolithographic fabrication technique.",
author = "Wang, {Michael Renxun}",
year = "1998",
month = "12",
day = "1",
language = "English",
volume = "37",
pages = "7568--7576",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "The Optical Society",
number = "32",

}

TY - JOUR

T1 - Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication

AU - Wang, Michael Renxun

PY - 1998/12/1

Y1 - 1998/12/1

N2 - High-efficiency diffractive optical elements can be achieved by an increase in the number of phase levels. We present a technique for laser direct-write gray-level masks on high-energy-beam-sensitive glass and one-step etching on the gray-level mask plate for the production of high-efficiency diffractive optical elements. Sixteen-phase-level diffractive microlenses and microlens arrays with a focusing efficiency of approximately 94% have been realized by use of the one-step nonphotolithographic fabrication technique.

AB - High-efficiency diffractive optical elements can be achieved by an increase in the number of phase levels. We present a technique for laser direct-write gray-level masks on high-energy-beam-sensitive glass and one-step etching on the gray-level mask plate for the production of high-efficiency diffractive optical elements. Sixteen-phase-level diffractive microlenses and microlens arrays with a focusing efficiency of approximately 94% have been realized by use of the one-step nonphotolithographic fabrication technique.

UR - http://www.scopus.com/inward/record.url?scp=0011046444&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0011046444&partnerID=8YFLogxK

M3 - Article

VL - 37

SP - 7568

EP - 7576

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 32

ER -