The oxidation rate of TiCl4 vapor was measured by FTIR spectroscopy between 700° and 1000°C in a furnace aerosol reactor. The reaction rate was found to be first order with respect to TiCl4 and to follow the Arrhenius form. The apparent activation energy for the reaction was 88.8 ± 3.2 kJ/mol and the preexponential factor 8.26 × 104 s−1. A kinetic mechanism for the oxidation of TiCl4 was proposed that was consistent with the observed dependence of oxygen concentration on the apparent rate constant.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of the American Ceramic Society|
|State||Published - Jul 1990|
ASJC Scopus subject areas
- Ceramics and Composites
- Materials Chemistry