Ion beam analysis of iridium-based TES for microcalorimeter detectors

M. Ribeiro Gomes, M. Galeazzi, D. Bogorin, N. Pessoa Barradas, E. Alves, N. Franco

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The physical properties of thin multilayer structures are deeply related to the crystalline quality and stoichiometry of the films. The interface roughness/mixing require a detailed study to determine its influence on the growth processes and surface topography. This is an important aspect when we have lattice mismatch between the superconducting thin-films and the substrates, and a high reliability/reproducibility is required as for large array microcalorimeter applications, as in the case of the MARE experiment, designed to measure the mass of the neutrino with sub-eV sensitivity by measuring the beta decay of 187Re with cryogenic microcalorimeters. Ion beam analysis techniques are ideal to determine the thickness and concentration profiles of the chemical species in ultra-thin films. Here we present the results on the Ir-based superconducting films deposited on Si-substrates based on systematic investigations of the concentration depth profiles of the multilayer structure using 2.0 MeV 4He+ ions for high resolution Rutherford Backscattering Spectrometry combined with X-Ray Reflectrometry to evaluate the interface/roughness mixing and the crystalline quality in the TES prototypes.

Original languageEnglish (US)
Title of host publicationLow Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop
Number of pages4
StatePublished - 2009
Event13th International Workshop on Low Temperature Detectors, LTD-13 - Stanford, CA, United States
Duration: Jul 20 2009Jul 24 2009

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other13th International Workshop on Low Temperature Detectors, LTD-13
Country/TerritoryUnited States
CityStanford, CA


  • Ion beam analysis
  • RBS
  • Thin films
  • Transition edge sensors

ASJC Scopus subject areas

  • Physics and Astronomy(all)


Dive into the research topics of 'Ion beam analysis of iridium-based TES for microcalorimeter detectors'. Together they form a unique fingerprint.

Cite this