@inproceedings{abd70e96a5a5422ca382f47751931b61,
title = "Ion beam analysis of iridium-based TES for microcalorimeter detectors",
abstract = "The physical properties of thin multilayer structures are deeply related to the crystalline quality and stoichiometry of the films. The interface roughness/mixing require a detailed study to determine its influence on the growth processes and surface topography. This is an important aspect when we have lattice mismatch between the superconducting thin-films and the substrates, and a high reliability/reproducibility is required as for large array microcalorimeter applications, as in the case of the MARE experiment, designed to measure the mass of the neutrino with sub-eV sensitivity by measuring the beta decay of 187Re with cryogenic microcalorimeters. Ion beam analysis techniques are ideal to determine the thickness and concentration profiles of the chemical species in ultra-thin films. Here we present the results on the Ir-based superconducting films deposited on Si-substrates based on systematic investigations of the concentration depth profiles of the multilayer structure using 2.0 MeV 4He+ ions for high resolution Rutherford Backscattering Spectrometry combined with X-Ray Reflectrometry to evaluate the interface/roughness mixing and the crystalline quality in the TES prototypes.",
keywords = "Ion beam analysis, RBS, Thin films, Transition edge sensors",
author = "Gomes, {M. Ribeiro} and M. Galeazzi and D. Bogorin and Barradas, {N. Pessoa} and E. Alves and N. Franco",
year = "2009",
month = dec,
day = "1",
doi = "10.1063/1.3292351",
language = "English (US)",
isbn = "9780735407510",
series = "AIP Conference Proceedings",
pages = "355--358",
booktitle = "Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop",
note = "13th International Workshop on Low Temperature Detectors, LTD-13 ; Conference date: 20-07-2009 Through 24-07-2009",
}