Integrated surface acoustic wave based sensors for fluidic applications

Burak Yildirim, Sukru U. Senveli, Rajapaksha W.R.L. Gajasinghe, Onur Tigli

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper illustrates the extension of Rayleigh wave based surface acoustic wave (SAW) device sensors previously developed by the authors to integration with microfluidics. The SAW device is first modeled with a microchannel and then analyzed using finite element method. Precise fabrication, alignment and bonding of polydimethylsiloxane (PDMS) microchannels on diced Y-Z lithium niobate substrates are accomplished. Low glycerin concentrations in deionized (DI) water are analyzed. Simulation results and vector network analyzer (VNA) measurements of the device with the microchannel integration are given. With new microchannel integrated SAW device, sensitivity of -0.53 (% glycerin) is achieved at peak frequency of 86.1 MHz. Minimum signal-to-noise ratio is found as 7.51 dB.

Original languageEnglish (US)
Title of host publicationIEEE Sensors, SENSORS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479982875
StatePublished - Jan 5 2017
Event15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States
Duration: Oct 30 2016Nov 2 2016

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Other15th IEEE Sensors Conference, SENSORS 2016
Country/TerritoryUnited States


  • Surface acoustic waves (SAWs)
  • liquid sensing
  • microfluidics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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