@inproceedings{25a606e371cc48f8b9d6e2d771da897c,
title = "Integrated microcalorimeters using Ir TES and Sn mushroom absorbers",
abstract = "Cryogenic microcalorimeters have the potential to meet the requirements of future x-ray missions. The University of Miami has recently started a program to fabricate fully integrated microcalorimeter arrays. We deposit high purity iridium thin film as Transition Edge Sensors (TES). We chose iridium because it has a bulk transition temperature of 112 mK and we expect single layer TES to have good reproducibility and long term stability. Also we use integrated tin film in a mushroom geometry as the absorbers to get high filling factor, low heat capacity and easy array manufacturing process. We present here our preliminary results in both areas.",
keywords = "Iridium, Microcalorimeters, Mushroom absorbers, Transition edge sensors",
author = "C. Chen and D. Bogorin and M. Galeazzi",
note = "Funding Information: This work is supported in part by NASA Grant NAG5-5402.; LOW TEMPERATURE PHYSICS: 24th International Conference on Low Temperature Physics - LT24 ; Conference date: 10-08-2006 Through 17-10-2006",
year = "2006",
doi = "10.1063/1.2355322",
language = "English (US)",
isbn = "0735403473",
series = "AIP Conference Proceedings",
pages = "1609--1610",
booktitle = "LOW TEMPERATURE PHYSICS",
}