Integrated CMOS Surface Acoustic Wave Gas Sensor: Design and Characteristics

Farid Hassani, Onur Tigli, Shahrokh Ahmadi, Can Korman, Mona Zaghloul

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations

Abstract

The development of inexpensive and miniaturized Surface Acoustics Wave (SAW) gas sensors that are highly selective and sensitive is described. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. IDT equivalent circuit and model for SAW delay line is introduced. Simulation results are included for characterization and design of the sensor. In this paper we will describe the design and post-processing steps to implement SAW device in CMOS technology. Design parameters of this device were obtained using modeling equivalent circuit to characterize sensor. Two approaches were used in the design of the SAW gas sensor that will be discussed. A CMOS chip was fabricated using MOSIS. Thin film ZnO was grown on Silicon based die and its characterizations is presented.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages1199-1202
Number of pages4
Volume2
Edition2
StatePublished - Dec 1 2003
Externally publishedYes
EventSecond IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: Oct 22 2003Oct 24 2003

Other

OtherSecond IEEE International Conference on Sensors: IEEE Sensors 2003
CountryCanada
CityToronto, Ont.
Period10/22/0310/24/03

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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