High-efficiency flat-top beam shaper fabricated by a nonlithographic technique

Xu Guang Huang, Michael Renxun Wang, Changyuan Yu

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We report a compact flat-top beam shaper fabricated by laser-assisted chemical etching upon an ion-exchanged high-energy-beam-sensitive glass. The beam shaper combines a phase filter element and a focusing lens element into a single diffractive optical element with a quasi-continuous surface relief profile. The fabrication takes advantage of the laser generation of gray-level patterns and one-step etching that are effective especially for such beam shaper fabrication. The demonstrated beam shaper with good flatness and edge features has an energy efficiency of 82%.

Original languageEnglish
Pages (from-to)208-213
Number of pages6
JournalOptical Engineering
Volume38
Issue number2
StatePublished - Feb 1 1999

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shapers
Etching
Diffractive optical elements
Fabrication
Lasers
Energy efficiency
Lenses
Glass
etching
Ions
fabrication
flatness
lasers
lenses
filters
energy
glass
profiles
ions

Keywords

  • Beam shaping
  • Diffractive optical element
  • Flat-top beam

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

High-efficiency flat-top beam shaper fabricated by a nonlithographic technique. / Huang, Xu Guang; Wang, Michael Renxun; Yu, Changyuan.

In: Optical Engineering, Vol. 38, No. 2, 01.02.1999, p. 208-213.

Research output: Contribution to journalArticle

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