He+ ion irradiation study of continuous and patterned CoPd multilayers

Vishal Parekh, Darren Smith, C. E. Chunsheng, James Rantschler, Sakhrat Khizroev, Dmitri Litvinov

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

Ion irradiation of continuous and patterned (CoPd)n magnetic multilayer films has been studied as a mean to control magnetic anisotropy as well as to evaluate possible ion irradiation damage involved in ion-beam proximity lithography patterning. The coercivity of patterned medium was found to decrease from 11 kOe for as patterned samples to 0.3 kOe for samples with 800 μC cm2 ion irradiation. Remnant squareness of the patterned samples remained essentially unchanged. As the number of bilayers increases in the sample, the effects vary, suggesting that several mechanisms of damage occur. Significantly, for typical irradiation doses used in ion-beam proximity lithography, no measurable alteration of magnetic properties was observed.

Original languageEnglish (US)
Article number083904
JournalJournal of Applied Physics
Volume101
Issue number8
DOIs
StatePublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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