Focused ion beams in future nanoscale probe recording

Dmitri Litvinov, Sakhrat Khizroev

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Focused ion beam (FIB) applications in the field of nanoscale probe recording are explored. A detailed description of how to use FIBs for trimming longitudinal and perpendicular magnetic recording and playback devices to dimensions of less than 100 nm is presented. An experiment was conducted to demonstrate that the magnetoresistive property of a read element, e.g. a giant-magnetoresistive sensor, strongly depends on the focused ion current and the beam accelerating voltage.

Original languageEnglish (US)
Pages (from-to)179-184
Number of pages6
JournalNanotechnology
Volume13
Issue number2
DOIs
StatePublished - Apr 2002
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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