Flame aerosol reactor synthesis of nanostructured SnO2 thin films: High gas-sensing properties by control of morphology

Zili Zhan, Wei Ning Wang, Liying Zhu, Woo Jin An, Pratim Biswas

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

Tin dioxide (SnO2) thin films were deposited on commercial alumina chips using a flame aerosol reactor (FLAR) system. The morphology of the thin films was controlled by changing various parameters, such as precursor concentration, burner-substrate distance, and deposition time. Three typical morphologies of the thin films were achieved, i.e., columnar, column-granular, and granular structures. The as-prepared thin films with columnar structures demonstrated improved sensing performance to ethanol vapor, due to their preferred orientation, single crystal phase, and unique morphology.

Original languageEnglish (US)
Pages (from-to)609-615
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume150
Issue number2
DOIs
StatePublished - Oct 28 2010
Externally publishedYes

Keywords

  • Metal oxide
  • Semiconductor
  • Spray
  • Thin film deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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