Finite element modeling and simulation of piezoelectric energy harvesters fabricated in CMOS technology

A. Mok, O. Tigli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Here we present a micron scaled piezoelectric energy harvester fabricated in a commercial Complementary Metal Oxide Semiconductor (CMOS) technology. The device is a multilayer cantilever clamped on one end that utilizes interdigitated transducers (IDTs) to collect charge from a zinc oxide (ZnO) piezoelectric layer. Hence the cantilever beam operates in the d 33 mode in order to produce more energy than a d 31 structure. Finite element modeling and simulations are performed to analyze the voltage on the IDTs for various frequencies with and without the addition of a proof mass. The results presented demonstrate that commercial FEM software can help designers to determine parameters such as material thickness, proof mass, and IDT dimensions for novel piezoelectric energy harvester devices pre-fabrication.

Original languageEnglish (US)
Title of host publicationNanotechnology 2012
Subtitle of host publicationElectronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
Pages558-561
Number of pages4
StatePublished - Aug 17 2012
EventNanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 - Santa Clara, CA, United States
Duration: Jun 18 2012Jun 21 2012

Publication series

NameTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012

Other

OtherNanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
CountryUnited States
CitySanta Clara, CA
Period6/18/126/21/12

Keywords

  • Complementary metal oxide semiconductor
  • Finite element modeling
  • Interdigitated transducers
  • Piezoelectric
  • Zinc oxide

ASJC Scopus subject areas

  • Ceramics and Composites
  • Surfaces, Coatings and Films

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  • Cite this

    Mok, A., & Tigli, O. (2012). Finite element modeling and simulation of piezoelectric energy harvesters fabricated in CMOS technology. In Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 (pp. 558-561). (Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012).