Finite element modeling and analysis of CMOS-SAW sensors

Onur Tigli, Mona E. Zaghloul

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Finite element modeling and performance analysis of Surface Acoustic Wave (SAW) devices that are developed in CMOS (Complementary Metal Oxide Semiconductor) technology are presented. CMOS-SAW devices were designed, fabricated and characterized as a biosensor for breast cancer biomarker detection. A detailed 3D model with 18 CMOS layers and a structured finite element (FE) analyses methodology are laid out to extract the acoustic behavior of the substrate and the piezoelectric material of interest, zinc oxide (ZnO). A three-step analysis encompassing modal, harmonic and transient simulations is detailed. Experimental characterization results for the fabricated CMOS-SAW devices with operating frequency of 322.7 MHz show close agreement to the FE simulations with only 0.8 % deviations for operation frequency. Displacement and stress/strain maps for wave propagation are also presented. The results demonstrate that commercial FEM toolsets can provide valuable insight into understanding acousto-electric interactions and wave characteristics or can readily be used for accurate design parameter extraction through reliable pre-fabrication simulation of SAW device performance.

Original languageEnglish (US)
Title of host publicationNanotechnology 2010
Subtitle of host publicationElectronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages601-604
Number of pages4
StatePublished - Nov 9 2010
Externally publishedYes
EventNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
Duration: Jun 21 2010Jun 24 2010

Publication series

NameNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Volume2

Other

OtherNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
CountryUnited States
CityAnaheim, CA
Period6/21/106/24/10

Keywords

  • CMOS
  • FEM
  • MEMS
  • SAW

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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