Finite element modeling and analysis of CMOS-SAW sensors

Onur Tigli, Mona E. Zaghloul

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Finite element modeling and performance analysis of Surface Acoustic Wave (SAW) devices that are developed in CMOS (Complementary Metal Oxide Semiconductor) technology are presented. CMOS-SAW devices were designed, fabricated and characterized as a biosensor for breast cancer biomarker detection. A detailed 3D model with 18 CMOS layers and a structured finite element (FE) analyses methodology are laid out to extract the acoustic behavior of the substrate and the piezoelectric material of interest, zinc oxide (ZnO). A three-step analysis encompassing modal, harmonic and transient simulations is detailed. Experimental characterization results for the fabricated CMOS-SAW devices with operating frequency of 322.7 MHz show close agreement to the FE simulations with only 0.8 % deviations for operation frequency. Displacement and stress/strain maps for wave propagation are also presented. The results demonstrate that commercial FEM toolsets can provide valuable insight into understanding acousto-electric interactions and wave characteristics or can readily be used for accurate design parameter extraction through reliable pre-fabrication simulation of SAW device performance.

Original languageEnglish
Title of host publicationNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages601-604
Number of pages4
Volume2
StatePublished - Nov 9 2010
Externally publishedYes
EventNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
Duration: Jun 21 2010Jun 24 2010

Other

OtherNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
CountryUnited States
CityAnaheim, CA
Period6/21/106/24/10

Fingerprint

Acoustic surface wave devices
Chemical elements
Surface waves
Acoustic waves
Sensors
Metals
Parameter extraction
Piezoelectric materials
Modal analysis
Zinc oxide
Biosensors
Wave propagation
Acoustics
Finite element method
Fabrication
Oxide semiconductors
Substrates

Keywords

  • CMOS
  • FEM
  • MEMS
  • SAW

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Tigli, O., & Zaghloul, M. E. (2010). Finite element modeling and analysis of CMOS-SAW sensors. In Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 (Vol. 2, pp. 601-604)

Finite element modeling and analysis of CMOS-SAW sensors. / Tigli, Onur; Zaghloul, Mona E.

Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2 2010. p. 601-604.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tigli, O & Zaghloul, ME 2010, Finite element modeling and analysis of CMOS-SAW sensors. in Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. vol. 2, pp. 601-604, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010, Anaheim, CA, United States, 6/21/10.
Tigli O, Zaghloul ME. Finite element modeling and analysis of CMOS-SAW sensors. In Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2. 2010. p. 601-604
Tigli, Onur ; Zaghloul, Mona E. / Finite element modeling and analysis of CMOS-SAW sensors. Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010. Vol. 2 2010. pp. 601-604
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