@inproceedings{0104a0f0ee834569ba931089f35e2cc8,
title = "Fabrication of single-mode channel waveguides via microfluidics",
abstract = "We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.",
keywords = "Microfluidic, Single-mode, Soft lithography, UV-curable, Waveguides",
author = "Sarfaraz Baig and Qunhui Sun and Wang, {Michael R.}",
year = "2011",
month = apr,
day = "11",
doi = "10.1117/12.876331",
language = "English (US)",
isbn = "9780819484642",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV",
note = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV ; Conference date: 25-01-2011 Through 26-01-2011",
}