Fabrication of single-mode channel waveguides via microfluidics

Sarfaraz Baig; Qunhui Sun; Michael R. Wang

doi:10.1117/12.876331

Fabrication of single-mode channel waveguides via microfluidics

Sarfaraz Baig, Qunhui Sun, Michael R. Wang

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.

Original language	English (US)
Title of host publication	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
DOIs	https://doi.org/10.1117/12.876331
State	Published - Apr 11 2011
Event	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV - San Francisco, CA, United States Duration: Jan 25 2011 → Jan 26 2011

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7927
ISSN (Print)	0277-786X

Other

Other	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
Country	United States
City	San Francisco, CA
Period	1/25/11 → 1/26/11

Keywords

Microfluidic
Single-mode
Soft lithography
UV-curable
Waveguides

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.876331

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Cite this

Baig, S., Sun, Q., & Wang, M. R. (2011). Fabrication of single-mode channel waveguides via microfluidics. In Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV [79270O] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7927). https://doi.org/10.1117/12.876331

Fabrication of single-mode channel waveguides via microfluidics. / Baig, Sarfaraz; Sun, Qunhui; Wang, Michael R.

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV. 2011. 79270O (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7927).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Baig, S, Sun, Q & Wang, MR 2011, Fabrication of single-mode channel waveguides via microfluidics. in Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV., 79270O, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, San Francisco, CA, United States, 1/25/11. https://doi.org/10.1117/12.876331

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