Fabrication of single-mode channel waveguides via microfluidics

Sarfaraz Baig, Qunhui Sun, Michael R. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.

Original languageEnglish (US)
Title of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
StatePublished - Apr 11 2011
EventAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IV - San Francisco, CA, United States
Duration: Jan 25 2011Jan 26 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
Country/TerritoryUnited States
CitySan Francisco, CA


  • Microfluidic
  • Single-mode
  • Soft lithography
  • UV-curable
  • Waveguides

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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