Abstract
We report on the fabrication of single-mode channel waveguide structures produced by the vacuum assisted microfluidic soft lithography technique. The soft lithographic technique in conjunction with a specially designed photomask pattern and a synthesized UV curable epoxy resin can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of the microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. Notably, the introduction of sectional flow tapers allows for proper uniform filling of long length small cross-sectional waveguide structures that would ordinarily succumb to clogging at shorter distances during channel filling. The fabricated polymer waveguide was 30 mm in length with a cross section dimension of 7 × 7 μm. The single-mode waveguide propagation was confirmed with beam profiler measurement, and the measured propagation loss for this polymer waveguide was about 0.55 dB/cm.
Original language | English (US) |
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Journal | Journal of the European Optical Society |
Volume | 8 |
DOIs | |
State | Published - Dec 3 2013 |
Keywords
- Integrated optics
- Microfluidics
- Polymer waveguides
- Soft-lithography
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics