An approach to fabrication of a patterned magnetic recording medium for next generation data storage systems is presented. (Co/Pd)n magnetic multilayers are evaluated as candidates for patterned medium materials for their high and easily controllable magnetic anisotropy. The multilayer films deposited on a Ta seed layer enable high intergranular exchange coupling - an essential feature of a patterned magnetic recording medium. The quality of (Co/Pd)n superlattices was optimized via deposition conditions and monitored using low-angle x-ray diffraction. An estimated in-plane (hard-axis) magnetization saturation field in excess of 40 000Oe was observed. Vertical (easy-axis) hysteresis loops for as-deposited continuous magnetic multilayers exhibited a low coercivity of 930Oe, indicating highly uniform (magnetically) films with weak domain wall pinning. Ion-beam proximity lithography was used to pattern magnetic multilayers into 43nm islands on a 135nm pitch. Following patterning, easy-axis coercivity increased nearly 15-fold to 12.7 kOe.
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering