Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors

Yen Tingfang, Dave Strome, Sung Jin Kim, Michael DiNezzaa, Alexander N. Cartwright, Wayne A. Anderson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The performance of ZnO metal-semiconductor-metal (MSM) photodetectors can be significantly influenced by modifications in the fabrication process. ZnO thin films were deposited onto silicon substrates by radio frequency magnetron sputtering and later annealed by conventional furnace, rapid thermal anneal or laser anneal. The photoluminescence (PL) analysis revealed that laser annealing at 250 mW/cm2 increased the 370 nm peak from 520 to 1700 a.u. and reduced the defect peak from 380 to 20 a.u. MSM photodetectors were fabricated using an interdigitated and parallel pattern. Values of current responsivity ranged from about 0.025 A/W to above 430 A/W depending upon fabrication conditions and design.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages232-237
Number of pages6
Volume1035
StatePublished - Dec 1 2008
Externally publishedYes
Event2007 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 26 2007Nov 30 2007

Other

Other2007 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/26/0711/30/07

Fingerprint

Zinc Oxide
Photodetectors
Zinc oxide
zinc oxides
photometers
Metals
Semiconductor materials
Fabrication
fabrication
metals
laser annealing
Lasers
Silicon
Magnetron sputtering
furnaces
radio frequencies
Photoluminescence
magnetron sputtering
Furnaces
Annealing

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Tingfang, Y., Strome, D., Kim, S. J., DiNezzaa, M., Cartwright, A. N., & Anderson, W. A. (2008). Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. In Materials Research Society Symposium Proceedings (Vol. 1035, pp. 232-237)

Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. / Tingfang, Yen; Strome, Dave; Kim, Sung Jin; DiNezzaa, Michael; Cartwright, Alexander N.; Anderson, Wayne A.

Materials Research Society Symposium Proceedings. Vol. 1035 2008. p. 232-237.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tingfang, Y, Strome, D, Kim, SJ, DiNezzaa, M, Cartwright, AN & Anderson, WA 2008, Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. in Materials Research Society Symposium Proceedings. vol. 1035, pp. 232-237, 2007 MRS Fall Meeting, Boston, MA, United States, 11/26/07.
Tingfang Y, Strome D, Kim SJ, DiNezzaa M, Cartwright AN, Anderson WA. Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. In Materials Research Society Symposium Proceedings. Vol. 1035. 2008. p. 232-237
Tingfang, Yen ; Strome, Dave ; Kim, Sung Jin ; DiNezzaa, Michael ; Cartwright, Alexander N. ; Anderson, Wayne A. / Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. Materials Research Society Symposium Proceedings. Vol. 1035 2008. pp. 232-237
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