Abstract
The performance of ZnO metal-semiconductor-metal (MSM) photodetectors can be significantly influenced by modifications in the fabrication process. ZnO thin films were deposited onto silicon substrates by radio frequency magnetron sputtering and later annealed by conventional furnace, rapid thermal anneal or laser anneal. The photoluminescence (PL) analysis revealed that laser annealing at 250 mW/cm2 increased the 370 nm peak from 520 to 1700 a.u. and reduced the defect peak from 380 to 20 a.u. MSM photodetectors were fabricated using an interdigitated and parallel pattern. Values of current responsivity ranged from about 0.025 A/W to above 430 A/W depending upon fabrication conditions and design.
| Original language | English (US) |
|---|---|
| Title of host publication | Zinc Oxide and Related Materials-2007 |
| Pages | 232-237 |
| Number of pages | 6 |
| State | Published - Dec 1 2008 |
| Externally published | Yes |
| Event | 2007 MRS Fall Meeting - Boston, MA, United States Duration: Nov 26 2007 → Nov 30 2007 |
Publication series
| Name | Materials Research Society Symposium Proceedings |
|---|---|
| Volume | 1035 |
| ISSN (Print) | 0272-9172 |
Other
| Other | 2007 MRS Fall Meeting |
|---|---|
| Country | United States |
| City | Boston, MA |
| Period | 11/26/07 → 11/30/07 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Fingerprint Dive into the research topics of 'Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors'. Together they form a unique fingerprint.
Cite this
Tingfang, Y., Strome, D., Sung, J. K., DiNezzaa, M., Cartwright, A. N., & Anderson, W. A. (2008). Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors. In Zinc Oxide and Related Materials-2007 (pp. 232-237). (Materials Research Society Symposium Proceedings; Vol. 1035).