@inproceedings{6088e5eb3743453e9ddfc1d45b4190f6,
title = "Effect of fabrication variables on the performance of zinc oxide metal-semiconductor-metal photodetectors",
abstract = "The performance of ZnO metal-semiconductor-metal (MSM) photodetectors can be significantly influenced by modifications in the fabrication process. ZnO thin films were deposited onto silicon substrates by radio frequency magnetron sputtering and later annealed by conventional furnace, rapid thermal anneal or laser anneal. The photoluminescence (PL) analysis revealed that laser annealing at 250 mW/cm2 increased the 370 nm peak from 520 to 1700 a.u. and reduced the defect peak from 380 to 20 a.u. MSM photodetectors were fabricated using an interdigitated and parallel pattern. Values of current responsivity ranged from about 0.025 A/W to above 430 A/W depending upon fabrication conditions and design.",
author = "Yen Tingfang and Dave Strome and Sung, {Jin Kim} and Michael DiNezzaa and Cartwright, {Alexander N.} and Anderson, {Wayne A.}",
year = "2008",
month = dec,
day = "1",
language = "English (US)",
isbn = "9781605608310",
series = "Materials Research Society Symposium Proceedings",
pages = "232--237",
booktitle = "Zinc Oxide and Related Materials-2007",
note = "2007 MRS Fall Meeting ; Conference date: 26-11-2007 Through 30-11-2007",
}