Design, modeling, and characterization of a novel circular surface acoustic wave device

Onur Tigli, Mona E. Zaghloul

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The design, modeling, and fabrication of a novel circular surface acoustic wave (SAW) device in complementary metal oxide semiconductor (CMOS) are introduced. The results obtained in authors' previous work demonstrated that it is possible to design and fabricate SAW-based sensors in CMOS with comparable performances to conventional devices. It is of great interest to improve the transfer characteristics and to reduce the losses of conventional rectangular SAW architectures for obtaining highly selective sensor platforms. Performance deficiencies of regular SAW devices in CMOS were addressed with this new architecture for improved performance. A 3-D model for the novel architecture was constructed. A detailed finite-element analysis was carried out to examine the transient, harmonic, and modal behavior of the new architecture under excitation. The devices were fabricated in 0.5 μm AMI semiconductor technology and the postprocessing was carried out using cost-effective CMOS compatible methods. The results demonstrate that it is possible to obtain highly oriented SAWs by using the novel circular architecture. A 12.24 dB insertion loss improvement was achieved when compared with a conventional rectangular device that was fabricated in the same technology.

Original languageEnglish
Article number4655539
Pages (from-to)1807-1815
Number of pages9
JournalIEEE Sensors Journal
Volume8
Issue number11
DOIs
StatePublished - Nov 1 2008
Externally publishedYes

Fingerprint

Acoustic surface wave devices
surface acoustic wave devices
CMOS
Metals
Surface waves
Acoustic waves
Sensors
Insertion losses
acoustics
sensors
insertion loss
Semiconductor materials
Finite element method
Fabrication
platforms
Oxide semiconductors
costs
harmonics
fabrication
Costs

Keywords

  • Complementary metal oxide semiconductor (CMOS)
  • Finite-element model (FEM)
  • Microelectromechanical systems (MEMS)
  • Surface acoustic wave (SAW)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Design, modeling, and characterization of a novel circular surface acoustic wave device. / Tigli, Onur; Zaghloul, Mona E.

In: IEEE Sensors Journal, Vol. 8, No. 11, 4655539, 01.11.2008, p. 1807-1815.

Research output: Contribution to journalArticle

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