Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication

James Lee, Marc J. Madou, Kurt W. Koelling, Sylvia Daunert, Siyi Lai, Guan Koh, Yi Je Juang, Yumin Lu, Liyong Yu

Research output: Contribution to journalArticle

81 Scopus citations

Abstract

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

Original languageEnglish (US)
Article number381088
Pages (from-to)339-351
Number of pages13
JournalBiomedical Microdevices
Volume3
Issue number4
DOIs
StatePublished - Jan 1 2001
Externally publishedYes

Keywords

  • CNC-machining
  • Deep reactive ion etching
  • Electroplating
  • Hot embossing
  • Liquid resin casting
  • Microfabrication
  • Photolithography
  • Thin wall injection molding

ASJC Scopus subject areas

  • Genetics
  • Medicine (miscellaneous)
  • Neuroscience(all)

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    Lee, J., Madou, M. J., Koelling, K. W., Daunert, S., Lai, S., Koh, G., Juang, Y. J., Lu, Y., & Yu, L. (2001). Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication. Biomedical Microdevices, 3(4), 339-351. [381088]. https://doi.org/10.1023/A:1012469017354