Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication

L. J. Lee, M. J. Madou, K. W. Koelling, Sylvia Daunert, S. Lai, C. G. Koh, Y. J. Juang, Y. Lu, L. Yu

Research output: Contribution to journalArticle

78 Citations (Scopus)

Abstract

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

Original languageEnglish
Pages (from-to)339-351
Number of pages13
JournalBiomedical Microdevices
Volume3
Issue number4
DOIs
StatePublished - Jan 1 2001
Externally publishedYes

Fingerprint

Microtechnology
Microfluidics
Microfabrication
Photolithography
Polymers
Fabrication
Electroplating
Machining
Steel
Plastics
Tool steel
Reactive ion etching
Fungi
Injection molding
Molding
Ions
Casting
Injections
Resins
Liquids

Keywords

  • CNC-machining
  • Deep reactive ion etching
  • Electroplating
  • Hot embossing
  • Liquid resin casting
  • Microfabrication
  • Photolithography
  • Thin wall injection molding

ASJC Scopus subject areas

  • Genetics
  • Medicine (miscellaneous)
  • Neuroscience(all)

Cite this

Design and fabrication of CD-like microfluidic platforms for diagnostics : Polymer-based microfabrication. / Lee, L. J.; Madou, M. J.; Koelling, K. W.; Daunert, Sylvia; Lai, S.; Koh, C. G.; Juang, Y. J.; Lu, Y.; Yu, L.

In: Biomedical Microdevices, Vol. 3, No. 4, 01.01.2001, p. 339-351.

Research output: Contribution to journalArticle

Lee, L. J. ; Madou, M. J. ; Koelling, K. W. ; Daunert, Sylvia ; Lai, S. ; Koh, C. G. ; Juang, Y. J. ; Lu, Y. ; Yu, L. / Design and fabrication of CD-like microfluidic platforms for diagnostics : Polymer-based microfabrication. In: Biomedical Microdevices. 2001 ; Vol. 3, No. 4. pp. 339-351.
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