Abstract
The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of IEEE Sensors |
| Pages | 137-140 |
| Number of pages | 4 |
| Volume | 2005 |
| DOIs | |
| State | Published - Dec 1 2005 |
| Externally published | Yes |
| Event | Fourth IEEE Conference on Sensors 2005 - Irvine, CA, United States Duration: Oct 31 2005 → Nov 3 2005 |
Other
| Other | Fourth IEEE Conference on Sensors 2005 |
|---|---|
| Country | United States |
| City | Irvine, CA |
| Period | 10/31/05 → 11/3/05 |
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ASJC Scopus subject areas
- Engineering (miscellaneous)
- Electrical and Electronic Engineering
Cite this
Design and fabrication of a novel SAW bio/chemical sensor in CMOS. / Tigli, Onur; Zaghloul, Mona E.
Proceedings of IEEE Sensors. Vol. 2005 2005. p. 137-140 1597655.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Design and fabrication of a novel SAW bio/chemical sensor in CMOS
AU - Tigli, Onur
AU - Zaghloul, Mona E.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
AB - The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
UR - http://www.scopus.com/inward/record.url?scp=33847325810&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847325810&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2005.1597655
DO - 10.1109/ICSENS.2005.1597655
M3 - Conference contribution
AN - SCOPUS:33847325810
SN - 0780390563
SN - 9780780390560
VL - 2005
SP - 137
EP - 140
BT - Proceedings of IEEE Sensors
ER -