TY - GEN
T1 - Design and fabrication of a novel SAW bio/chemical sensor in CMOS
AU - Tigli, Onur
AU - Zaghloul, Mona E.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
AB - The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
UR - http://www.scopus.com/inward/record.url?scp=33847325810&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847325810&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2005.1597655
DO - 10.1109/ICSENS.2005.1597655
M3 - Conference contribution
AN - SCOPUS:33847325810
SN - 0780390563
SN - 9780780390560
T3 - Proceedings of IEEE Sensors
SP - 137
EP - 140
BT - Proceedings of the Fourth IEEE Conference on Sensors 2005
T2 - Fourth IEEE Conference on Sensors 2005
Y2 - 31 October 2005 through 3 November 2005
ER -