Design and fabrication of a novel SAW bio/chemical sensor in CMOS

Onur Tigli; Mona E. Zaghloul

doi:10.1109/ICSENS.2005.1597655

Design and fabrication of a novel SAW bio/chemical sensor in CMOS

Onur Tigli, Mona E. Zaghloul

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Scopus citations

Abstract

The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 μm 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.

Original language	English (US)
Title of host publication	Proceedings of the Fourth IEEE Conference on Sensors 2005
Pages	137-140
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2005.1597655
State	Published - Dec 1 2005
Externally published	Yes
Event	Fourth IEEE Conference on Sensors 2005 - Irvine, CA, United States Duration: Oct 31 2005 → Nov 3 2005

Publication series

Name	Proceedings of IEEE Sensors
Volume	2005

Other

Other	Fourth IEEE Conference on Sensors 2005
Country	United States
City	Irvine, CA
Period	10/31/05 → 11/3/05

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2005.1597655

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Tigli, O., & Zaghloul, M. E. (2005). Design and fabrication of a novel SAW bio/chemical sensor in CMOS. In Proceedings of the Fourth IEEE Conference on Sensors 2005 (pp. 137-140). [1597655] (Proceedings of IEEE Sensors; Vol. 2005). https://doi.org/10.1109/ICSENS.2005.1597655

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