Control of batch processing systems in semiconductor wafer fabrication facilities

Haresh Gurnani, Ravi Anupindi, Ram Akella

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

Loading policies for a batch processing machine, i.e., a machine that can process more than one job at a time, when the arrival times of jobs to the machine are uncertain, are described. The motivation for the study is the structure of process flows and the predominance of batch processing systems in a semiconductor wafer fabrication facility. A two stage serial-batch system with the serial stage (e.g., photolithography) feeding the batch (e.g., furnace) is considered. Machines in the serial stage process one job at a time; further, these machines are subject to failure. A control limit policy for loading the batch machine is assumed, i.e., load if the queue length ≥Q, else wait until the number of jobs in queue is at least Q. The basic tradeoffs considered are delay (waiting too long) vs. capacity utilization (loading early with very few jobs). An average cost analysis is done and optimized to compute the critical number Q. In an extension to the basic model, the effect of due dates on the critical number is analyzed. Comparison with simulation results is very encouraging.

Original languageEnglish (US)
Pages (from-to)319-328
Number of pages10
JournalIEEE Transactions on Semiconductor Manufacturing
Volume5
Issue number4
DOIs
StatePublished - Nov 1992

Fingerprint

batch processing
wafers
Semiconductor materials
Fabrication
fabrication
Photolithography
cost analysis
Furnaces
tradeoffs
photolithography
arrivals
furnaces
Costs
simulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Control of batch processing systems in semiconductor wafer fabrication facilities. / Gurnani, Haresh; Anupindi, Ravi; Akella, Ram.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 5, No. 4, 11.1992, p. 319-328.

Research output: Contribution to journalArticle

Gurnani, Haresh ; Anupindi, Ravi ; Akella, Ram. / Control of batch processing systems in semiconductor wafer fabrication facilities. In: IEEE Transactions on Semiconductor Manufacturing. 1992 ; Vol. 5, No. 4. pp. 319-328.
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