Control of batch processing systems

Haresh Gurnani, Ravi Anupindi, Ram Akella

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The authors describe loading policies for a batch processing machine, i.e., a machine that can process more than one job at a time, when the arrival times of jobs to the machine are uncertain. The study is motivated by the structure of process flows and the predominance of batch processing systems in a semiconductor wafer fabrication facility. The authors consider a two-stage serial-batch system with the serial stage (e.g., photolithography) feeding the batch (e.g., furnace). Machines in the serial stage process one job at a time; further, these machines are subject to failure. The following control limit policy for loading the batch machine is assumed: load if the queue length ≥ Q, else wait until the number of jobs in queue is at least Q. The basic tradeoff considered is delay vs. capacity utilization. The authors do an average cost analysis and optimize to compute the critical number Q.

Original languageEnglish (US)
Title of host publicationProceedings - IEEE International Conference on Robotics and Automation
PublisherPubl by IEEE
Pages1772-1777
Number of pages6
Volume2
StatePublished - 1991
Externally publishedYes
EventProceedings of the 1991 IEEE International Conference on Robotics and Automation - Sacramento, CA, USA
Duration: Apr 9 1991Apr 11 1991

Other

OtherProceedings of the 1991 IEEE International Conference on Robotics and Automation
CitySacramento, CA, USA
Period4/9/914/11/91

Fingerprint

Photolithography
Furnaces
Semiconductor materials
Fabrication
Costs

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering

Cite this

Gurnani, H., Anupindi, R., & Akella, R. (1991). Control of batch processing systems. In Proceedings - IEEE International Conference on Robotics and Automation (Vol. 2, pp. 1772-1777). Publ by IEEE.

Control of batch processing systems. / Gurnani, Haresh; Anupindi, Ravi; Akella, Ram.

Proceedings - IEEE International Conference on Robotics and Automation. Vol. 2 Publ by IEEE, 1991. p. 1772-1777.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gurnani, H, Anupindi, R & Akella, R 1991, Control of batch processing systems. in Proceedings - IEEE International Conference on Robotics and Automation. vol. 2, Publ by IEEE, pp. 1772-1777, Proceedings of the 1991 IEEE International Conference on Robotics and Automation, Sacramento, CA, USA, 4/9/91.
Gurnani H, Anupindi R, Akella R. Control of batch processing systems. In Proceedings - IEEE International Conference on Robotics and Automation. Vol. 2. Publ by IEEE. 1991. p. 1772-1777
Gurnani, Haresh ; Anupindi, Ravi ; Akella, Ram. / Control of batch processing systems. Proceedings - IEEE International Conference on Robotics and Automation. Vol. 2 Publ by IEEE, 1991. pp. 1772-1777
@inproceedings{40fa2a2616ec44bbb9e6c19202c15942,
title = "Control of batch processing systems",
abstract = "The authors describe loading policies for a batch processing machine, i.e., a machine that can process more than one job at a time, when the arrival times of jobs to the machine are uncertain. The study is motivated by the structure of process flows and the predominance of batch processing systems in a semiconductor wafer fabrication facility. The authors consider a two-stage serial-batch system with the serial stage (e.g., photolithography) feeding the batch (e.g., furnace). Machines in the serial stage process one job at a time; further, these machines are subject to failure. The following control limit policy for loading the batch machine is assumed: load if the queue length ≥ Q, else wait until the number of jobs in queue is at least Q. The basic tradeoff considered is delay vs. capacity utilization. The authors do an average cost analysis and optimize to compute the critical number Q.",
author = "Haresh Gurnani and Ravi Anupindi and Ram Akella",
year = "1991",
language = "English (US)",
volume = "2",
pages = "1772--1777",
booktitle = "Proceedings - IEEE International Conference on Robotics and Automation",
publisher = "Publ by IEEE",

}

TY - GEN

T1 - Control of batch processing systems

AU - Gurnani, Haresh

AU - Anupindi, Ravi

AU - Akella, Ram

PY - 1991

Y1 - 1991

N2 - The authors describe loading policies for a batch processing machine, i.e., a machine that can process more than one job at a time, when the arrival times of jobs to the machine are uncertain. The study is motivated by the structure of process flows and the predominance of batch processing systems in a semiconductor wafer fabrication facility. The authors consider a two-stage serial-batch system with the serial stage (e.g., photolithography) feeding the batch (e.g., furnace). Machines in the serial stage process one job at a time; further, these machines are subject to failure. The following control limit policy for loading the batch machine is assumed: load if the queue length ≥ Q, else wait until the number of jobs in queue is at least Q. The basic tradeoff considered is delay vs. capacity utilization. The authors do an average cost analysis and optimize to compute the critical number Q.

AB - The authors describe loading policies for a batch processing machine, i.e., a machine that can process more than one job at a time, when the arrival times of jobs to the machine are uncertain. The study is motivated by the structure of process flows and the predominance of batch processing systems in a semiconductor wafer fabrication facility. The authors consider a two-stage serial-batch system with the serial stage (e.g., photolithography) feeding the batch (e.g., furnace). Machines in the serial stage process one job at a time; further, these machines are subject to failure. The following control limit policy for loading the batch machine is assumed: load if the queue length ≥ Q, else wait until the number of jobs in queue is at least Q. The basic tradeoff considered is delay vs. capacity utilization. The authors do an average cost analysis and optimize to compute the critical number Q.

UR - http://www.scopus.com/inward/record.url?scp=0025840034&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025840034&partnerID=8YFLogxK

M3 - Conference contribution

VL - 2

SP - 1772

EP - 1777

BT - Proceedings - IEEE International Conference on Robotics and Automation

PB - Publ by IEEE

ER -