Channel waveguide fabrication via microtransfer molding and microfluidic technique

Sarfaraz Baig, Bing Chen, Angel Flores, Sangyup Song, Michael Renxun Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on various single and multimode channel waveguide structures fabricated via microtransfer molding and microfluidic techniques. These soft lithographic fabrication techniques can result in an inexpensive and rapid turnover of various types of channel waveguide structures and general integrated optic devices. It may be particularly useful for production of waveguides on user-desired surface substrates including those of a curved or distorted nature. Microscopic cross-sectional images for both single and multimode waveguides are obtained and compared between the two fabrication methods. The novel microfluidic technique results in superior waveguide formation and improved propagation loss performance.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume7221
DOIs
StatePublished - Jun 15 2009
EventPhotonics Packaging, Integration, and Interconnects IX - San Jose, CA, United States
Duration: Jan 26 2009Jan 28 2009

Other

OtherPhotonics Packaging, Integration, and Interconnects IX
CountryUnited States
CitySan Jose, CA
Period1/26/091/28/09

Fingerprint

Molding
Microfluidics
Waveguide
Fabrication
Waveguides
waveguides
fabrication
Integrated Optics
Integrated optics
integrated optics
Substrate
Propagation
propagation
Substrates

Keywords

  • Microfluidic
  • Microtransfer
  • Soft lithography
  • Waveguides

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Baig, S., Chen, B., Flores, A., Song, S., & Wang, M. R. (2009). Channel waveguide fabrication via microtransfer molding and microfluidic technique. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 7221). [72210L] https://doi.org/10.1117/12.810554

Channel waveguide fabrication via microtransfer molding and microfluidic technique. / Baig, Sarfaraz; Chen, Bing; Flores, Angel; Song, Sangyup; Wang, Michael Renxun.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7221 2009. 72210L.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Baig, S, Chen, B, Flores, A, Song, S & Wang, MR 2009, Channel waveguide fabrication via microtransfer molding and microfluidic technique. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 7221, 72210L, Photonics Packaging, Integration, and Interconnects IX, San Jose, CA, United States, 1/26/09. https://doi.org/10.1117/12.810554
Baig S, Chen B, Flores A, Song S, Wang MR. Channel waveguide fabrication via microtransfer molding and microfluidic technique. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7221. 2009. 72210L https://doi.org/10.1117/12.810554
Baig, Sarfaraz ; Chen, Bing ; Flores, Angel ; Song, Sangyup ; Wang, Michael Renxun. / Channel waveguide fabrication via microtransfer molding and microfluidic technique. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7221 2009.
@inproceedings{3fc9265f8b4b46ab97120f05ee846f73,
title = "Channel waveguide fabrication via microtransfer molding and microfluidic technique",
abstract = "We report on various single and multimode channel waveguide structures fabricated via microtransfer molding and microfluidic techniques. These soft lithographic fabrication techniques can result in an inexpensive and rapid turnover of various types of channel waveguide structures and general integrated optic devices. It may be particularly useful for production of waveguides on user-desired surface substrates including those of a curved or distorted nature. Microscopic cross-sectional images for both single and multimode waveguides are obtained and compared between the two fabrication methods. The novel microfluidic technique results in superior waveguide formation and improved propagation loss performance.",
keywords = "Microfluidic, Microtransfer, Soft lithography, Waveguides",
author = "Sarfaraz Baig and Bing Chen and Angel Flores and Sangyup Song and Wang, {Michael Renxun}",
year = "2009",
month = "6",
day = "15",
doi = "10.1117/12.810554",
language = "English",
isbn = "9780819474674",
volume = "7221",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Channel waveguide fabrication via microtransfer molding and microfluidic technique

AU - Baig, Sarfaraz

AU - Chen, Bing

AU - Flores, Angel

AU - Song, Sangyup

AU - Wang, Michael Renxun

PY - 2009/6/15

Y1 - 2009/6/15

N2 - We report on various single and multimode channel waveguide structures fabricated via microtransfer molding and microfluidic techniques. These soft lithographic fabrication techniques can result in an inexpensive and rapid turnover of various types of channel waveguide structures and general integrated optic devices. It may be particularly useful for production of waveguides on user-desired surface substrates including those of a curved or distorted nature. Microscopic cross-sectional images for both single and multimode waveguides are obtained and compared between the two fabrication methods. The novel microfluidic technique results in superior waveguide formation and improved propagation loss performance.

AB - We report on various single and multimode channel waveguide structures fabricated via microtransfer molding and microfluidic techniques. These soft lithographic fabrication techniques can result in an inexpensive and rapid turnover of various types of channel waveguide structures and general integrated optic devices. It may be particularly useful for production of waveguides on user-desired surface substrates including those of a curved or distorted nature. Microscopic cross-sectional images for both single and multimode waveguides are obtained and compared between the two fabrication methods. The novel microfluidic technique results in superior waveguide formation and improved propagation loss performance.

KW - Microfluidic

KW - Microtransfer

KW - Soft lithography

KW - Waveguides

UR - http://www.scopus.com/inward/record.url?scp=66749098971&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=66749098971&partnerID=8YFLogxK

U2 - 10.1117/12.810554

DO - 10.1117/12.810554

M3 - Conference contribution

SN - 9780819474674

VL - 7221

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -