Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data

S. C. Russev, M. I. Boyanov, J. P. Drolet, Roger Leblanc

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The substrate refractive index of a single-layer system from ellipsometric data was determined using an analytical solution. The inverse ellipsometric data was reduced to find the roots of a third-degree polynomial which in turn, can be used to compute the unknown refractive index. The approximate solution was applied for the refractive index determination of an ultrathin covering layer.

Original languageEnglish
Pages (from-to)1496-1500
Number of pages5
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume16
Issue number6
StatePublished - Jun 1 1999

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Optical constants
Refractive index
Substrates
Polynomials

ASJC Scopus subject areas

  • Engineering(all)

Cite this

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abstract = "The substrate refractive index of a single-layer system from ellipsometric data was determined using an analytical solution. The inverse ellipsometric data was reduced to find the roots of a third-degree polynomial which in turn, can be used to compute the unknown refractive index. The approximate solution was applied for the refractive index determination of an ultrathin covering layer.",
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AU - Leblanc, Roger

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