Analytical determination of the optical constants of a substrate in the presence of a covering layer by use of ellipsometric data

S. C. Russev, M. I. Boyanov, J. P. Drolet, R. M. Leblanc

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

The substrate refractive index of a single-layer system from ellipsometric data was determined using an analytical solution. The inverse ellipsometric data was reduced to find the roots of a third-degree polynomial which in turn, can be used to compute the unknown refractive index. The approximate solution was applied for the refractive index determination of an ultrathin covering layer.

Original languageEnglish (US)
Pages (from-to)1496-1500
Number of pages5
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume16
Issue number6
DOIs
StatePublished - Jun 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Vision and Pattern Recognition

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