A novel circular SAW (surface acoustic wave) device in CMOS

Onur Tigli, Mona E. Zaghloul

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

The design, modeling and fabrication of a novel circular SAW device in CMOS (Complementary Metal Oxide Semiconductor) are introduced. The results obtained in [1] demonstrate that it is possible to design and fabricate SAW based sensors in CMOS with comparable performance to conventional devices. It is of great interest to improve the transfer characteristics and to reduce the losses of conventional rectangular SAW architectures for obtaining highly selective sensor platforms. Performance deficiencies of regular SAW devices in CMOS were addressed with this new architecture for improved performance. A 3D model for the novel architecture was constructed. A detailed finite element analysis was carried out to examine the transient, harmonic and modal behavior of the new architecture under excitation. The devices were fabricated in 0.5 μm AMI technology and the post processing was carried out using the methods developed in [2]. The results demonstrate that it is possible to obtain highly oriented surface acoustic waves by using the novel circular architecture. A 17.4 dB insertion loss and a 10.8 MHz of 3dB bandwidth improvement were achieved when compared to a conventional rectangular device.

Original languageEnglish (US)
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages474-477
Number of pages4
DOIs
StatePublished - Dec 1 2007
Externally publishedYes
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period10/28/0710/31/07

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Tigli, O., & Zaghloul, M. E. (2007). A novel circular SAW (surface acoustic wave) device in CMOS. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 474-477). [4388439] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388439