Abstract
In this study, we use finite element method (FEM) analysis to investigate a surface acoustic wave (SAW) based system. This platform involves a regular SAW device with two interdigitated transducers (IDTs) as input and outputs along with a microcavity etched in the middle of the delay line for sensing. This sensing part of the system houses liquids and solid microbeads for the purposes of our simulations. With a peak frequency of 200 MHz, the system mechanically analyzes sample volumes less than 10 pL through coupling of Rayleigh waves to the captured samples. In mixture of glycerin and water between 40% and 90% an approximately linear relation exists between the output phase and glycerin percentage. At this range, a maximum change in the phase of -0.77° was obtained per glycerin percent for microcavities with a depth of 8 μm. When microbeads with a stiffness of 3 GPa are placed in a liquid mixture of 10% glycerin, a linearized sensitivity of -69.4 °/GPa around 3 GPa point is obtained.
| Original language | English |
|---|---|
| Title of host publication | Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 |
| Publisher | Nano Science and Technology Institute |
| Pages | 73-76 |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (Print) | 9781482258271 |
| State | Published - Jan 1 2014 |
| Event | Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 - Washington, DC, United States Duration: Jun 15 2014 → Jun 18 2014 |
Other
| Other | Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 |
|---|---|
| Country | United States |
| City | Washington, DC |
| Period | 6/15/14 → 6/18/14 |
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Keywords
- Liquid sensing
- Microcavity
- Surface acoustic waves
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
A computational study on detection of ultra small volumes of liquid and solid media in microcavities using surface acoustic wave device. / Senveli, Sukru U.; Tigli, Onur.
Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014. Vol. 2 Nano Science and Technology Institute, 2014. p. 73-76.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A computational study on detection of ultra small volumes of liquid and solid media in microcavities using surface acoustic wave device
AU - Senveli, Sukru U.
AU - Tigli, Onur
PY - 2014/1/1
Y1 - 2014/1/1
N2 - In this study, we use finite element method (FEM) analysis to investigate a surface acoustic wave (SAW) based system. This platform involves a regular SAW device with two interdigitated transducers (IDTs) as input and outputs along with a microcavity etched in the middle of the delay line for sensing. This sensing part of the system houses liquids and solid microbeads for the purposes of our simulations. With a peak frequency of 200 MHz, the system mechanically analyzes sample volumes less than 10 pL through coupling of Rayleigh waves to the captured samples. In mixture of glycerin and water between 40% and 90% an approximately linear relation exists between the output phase and glycerin percentage. At this range, a maximum change in the phase of -0.77° was obtained per glycerin percent for microcavities with a depth of 8 μm. When microbeads with a stiffness of 3 GPa are placed in a liquid mixture of 10% glycerin, a linearized sensitivity of -69.4 °/GPa around 3 GPa point is obtained.
AB - In this study, we use finite element method (FEM) analysis to investigate a surface acoustic wave (SAW) based system. This platform involves a regular SAW device with two interdigitated transducers (IDTs) as input and outputs along with a microcavity etched in the middle of the delay line for sensing. This sensing part of the system houses liquids and solid microbeads for the purposes of our simulations. With a peak frequency of 200 MHz, the system mechanically analyzes sample volumes less than 10 pL through coupling of Rayleigh waves to the captured samples. In mixture of glycerin and water between 40% and 90% an approximately linear relation exists between the output phase and glycerin percentage. At this range, a maximum change in the phase of -0.77° was obtained per glycerin percent for microcavities with a depth of 8 μm. When microbeads with a stiffness of 3 GPa are placed in a liquid mixture of 10% glycerin, a linearized sensitivity of -69.4 °/GPa around 3 GPa point is obtained.
KW - Liquid sensing
KW - Microcavity
KW - Surface acoustic waves
UR - http://www.scopus.com/inward/record.url?scp=84907391842&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84907391842&partnerID=8YFLogxK
M3 - Conference contribution
SN - 9781482258271
VL - 2
SP - 73
EP - 76
BT - Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
PB - Nano Science and Technology Institute
ER -