A computational study on detection of ultra small volumes of liquid and solid media in microcavities using surface acoustic wave device

Sukru U. Senveli, Onur Tigli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we use finite element method (FEM) analysis to investigate a surface acoustic wave (SAW) based system. This platform involves a regular SAW device with two interdigitated transducers (IDTs) as input and outputs along with a microcavity etched in the middle of the delay line for sensing. This sensing part of the system houses liquids and solid microbeads for the purposes of our simulations. With a peak frequency of 200 MHz, the system mechanically analyzes sample volumes less than 10 pL through coupling of Rayleigh waves to the captured samples. In mixture of glycerin and water between 40% and 90% an approximately linear relation exists between the output phase and glycerin percentage. At this range, a maximum change in the phase of -0.77° was obtained per glycerin percent for microcavities with a depth of 8 μm. When microbeads with a stiffness of 3 GPa are placed in a liquid mixture of 10% glycerin, a linearized sensitivity of -69.4 °/GPa around 3 GPa point is obtained.

Original languageEnglish (US)
Title of host publicationTechnical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
PublisherNano Science and Technology Institute
Pages73-76
Number of pages4
ISBN (Print)9781482258271
StatePublished - Jan 1 2014
EventNanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 - Washington, DC, United States
Duration: Jun 15 2014Jun 18 2014

Publication series

NameTechnical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
Volume2

Other

OtherNanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
CountryUnited States
CityWashington, DC
Period6/15/146/18/14

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Keywords

  • Liquid sensing
  • Microcavity
  • Surface acoustic waves

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Senveli, S. U., & Tigli, O. (2014). A computational study on detection of ultra small volumes of liquid and solid media in microcavities using surface acoustic wave device. In Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 (pp. 73-76). (Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014; Vol. 2). Nano Science and Technology Institute.