3D microstructures fabricated by prism-assisted inclined UV lithography

Guomin Jiang, Sarfaraz Baig, Michael R. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.

Original languageEnglish (US)
Title of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V
DOIs
StatePublished - Apr 16 2012
EventAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V - San Francisco, CA, United States
Duration: Jan 24 2012Jan 25 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8249
ISSN (Print)0277-786X

Other

OtherAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics V
CountryUnited States
CitySan Francisco, CA
Period1/24/121/25/12

Keywords

  • 3D microstructures
  • Micro fabrication
  • Prism
  • UV lithography

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • Cite this

    Jiang, G., Baig, S., & Wang, M. R. (2012). 3D microstructures fabricated by prism-assisted inclined UV lithography. In Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V [82490L] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8249). https://doi.org/10.1117/12.908191